Radiation detector and method for producing the same
View Patent ↗According to one embodiment, a radiation detector includes, a substrate, a scintillator layer, a moistureproof body, and an adhesion layer. The substrate comprises a photoelectric conversion element. The scintillator layer is formed on the substrate and converts radiation into fluorescence. The moistureproof body comprises a flange portion in a periphery thereof, the moistureproof body being deep enough to contain at least the scintillator layer. The adhesion layer causes the substrate and the flange portion of the moistureproof body to adhere to each other in a sealed manner.
1. A radiation detector comprising:
a substrate comprising a photoelectric conversion element;
a scintillator layer formed on the substrate to convert radiation into fluorescence;
a hat-shaped moistureproof body comprising a flange portion along a periphery thereof while being deep enough to contain at least the scintillator layer; and
an adhesion layer containing a different material from a material of the moistureproof body and being formed differently from the moistureproof body, the adhesion layer causing the substrate and the flange portion of the moistureproof body to adhere to each other in a sealed manner.
2. The radiation detector according to claim 1 , wherein the adhesion layer contains filler particles in a resin material having a size smaller than the thickness of the adhesion layer.
3. The radiation detector according to claim 1 , wherein the adhesion layer satisfies a relationship of W/T>10, where T is a substantial average thickness of the adhesion layer and W is a substantial average width of the adhesion layer.
4. The radiation detector according to claim 1 , wherein the moistureproof body is made of either Al or an Al alloy in a form of either foil or a thin plate, and processed in a hat shape, and
the adhesion layer is arranged separately from the scintillator layer, in a periphery of the scintillator layer.
5. The radiation detector according to claim 4 , wherein the moistureproof body is electrically connected to at least part of a circuit interconnection formed on the substrate or a circuit board of the radiation detector.
6. The radiation detector according to claim 1 , wherein the moistureproof body is formed in a laminated structure including a resin material film and either a light-element inorganic or a light-metal film, and
the adhesion layer is arranged separately from the scintillator layer, in a periphery of the scintillator layer.
7. The radiation detector according to claim 1 , wherein a fluorescence-absorbing layer that absorbs the fluorescence is provided in a surface on a side of the scintillator layer of the moistureproof body, and
the fluorescence-absorbing layer contains a different material from the materials of the moistureproof body and the adhesion layer.
8. The radiation detector according to claim 1 , further comprising a reflection layer provided between the scintillator layer and the moistureproof body to reflect the fluorescence toward a side of the substrate.
9. The radiation detector according to claim 8 , further comprising a buffer sheet provided between the reflection layer and the moistureproof body.
10. The radiation detector according to claim 1 , further comprising a buffer sheet provided between the scintillator layer and the moistureproof body.
11. The radiation detector according to claim 1 , wherein the unoccupied volume inside the moistureproof body at 1 atm is ½ or less with respect to the unoccupied volume inside the moistureproof body in reducing a outside pressure of the moistureproof body to 0.1 atm or less.
12. A method for producing the radiation detector according to claim 1 , wherein the moistureproof body and the substrate are caused to adhere to each other in the sealed manner in a reduced-pressure state.
13. The method for producing a radiation detector according to claim 12 , wherein, in the adhesion layer, an ultraviolet curable adhesive agent is applied to at least either the flange portion of the moistureproof body or a surface on a side of the substrate adhering to the flange portion, the flange portion of the moistureproof body is brought into close contact with the substrate, and then either an adhesive agent is irradiated with an ultraviolet ray to cure the adhesive agent at room temperature.
14. The method for producing a radiation detector according to claim 13 , wherein, the adhesive agent is further cured by heating after irradiated with the ultraviolet ray to cure the adhesive agent at room temperature.
15. The method for producing a radiation detector according to claim 13 , wherein a curing reaction is generated by irradiating the adhesion layer with the ultraviolet ray from the back side of the substrate thorough opening area between circuit lines formed on the substrate using an ultraviolet curable adhesive agent in which the curing reaction proceeds by cationic polymerization.
16. The method for producing a radiation detector according to claim 1 , wherein, in the adhesion layer, an ultraviolet curable adhesive agent is applied to at least either the flange portion of the moistureproof body or a surface on a side of the substrate adhering to the flange portion, the flange portion of the moistureproof body is brought into close contact with the substrate, and then either an adhesive agent is irradiated with an ultraviolet ray to cure the adhesive agent at room temperature.