Semiconductor device and manufacturing method thereof
View Patent ↗A semiconductor structure having a cap layer formed over a metalized dielectric layer is formed by depositing manganese on the surface of the metalized dielectric layer. The deposited manganese serves as a first cap layer to remove oxidation on the surface of the metalized dielectric layer. The presence of oxidation on the surface of the metalized dielectric layer can be delirious for performance of a device constructed out of the semiconductor structure. A second cap layer is then formed by depositing silicon carbide or nitrogen enriched silicon carbide over the first cap layer.
1. A method for manufacturing a semiconductor structure, comprising:
forming a metallic interconnection line in a dielectric layer above a semiconductor substrate, the metallic interconnection line including a natural oxide film on a top surface of the metallic interconnection line;
forming a first cap layer including Mn atoms or ions to cover at least a portion of the dielectric layer and at least a portion of the metallic interconnection line; and
forming a second cap layer on the first cap layer, the second cap layer being an insulator,
wherein the natural oxide film and the first cap layer react to form manganese oxide between the first cap layer and the interconnection line.
2. The method of claim 1 , wherein the first cap layer is one or more selected from a manganese layer and a manganese oxide layer.
3. The method of claim 1 , wherein elemental manganese is used to form the first cap layer.
4. The method of claim 1 , wherein the natural oxide film and the first cap layer react before forming the second cap layer.
5. The method of claim 1 , wherein the first cap layer after formation comprises one or more selected from manganese oxide, manganese silicon oxide, and oxidized manganese compounds.
6. The method of claim 1 , wherein the metallic interconnection line comprises copper.
7. The method of claim 1 , wherein the first cap layer after formation comprises manganese oxide.
8. The method of claim 1 , wherein manganese present in the first cap layer reacts with oxidized copper present in the natural oxide film to reduce or eliminate the amount of oxidized copper present in the natural oxide film on the surface of the metallic interconnection line.
9. The method of claim 1 , wherein the first cap layer has an average thickness from about 2 to about 10 nm.
10. The method of claim 1 , the natural oxide film and the first cap layer react after forming the second cap layer.
11. A method for increasing the adhesion between a copper-containing interconnection line and a cap layer, comprising:
providing a dielectric layer formed over a semiconductor substrate and having a copper interconnection line formed therein;
depositing manganese to cover at least a portion of the dielectric layer having the copper-containing interconnection line formed therein and at least a portion of the copper-containing interconnection line to form a first cap layer; and
depositing one or more material selected from silicon carbide and nitrogen enriched silicon carbide over the deposited manganese cap layer to form a second cap layer,
wherein a portion of the interface between the copper-containing interconnection line and the first cap layer comprises manganese oxide, the manganese oxide formed by the reaction between a natural oxide film on a top surface of the copper-containing interconnection line and manganese present in the first cap layer.
12. The method of claim 11 , wherein the first cap layer after deposition comprises one or more selected from manganese oxide, manganese silicon oxide, and oxidized manganese compounds.
13. The method of claim 11 , wherein the dielectric layer comprises a low-k material.
14. The method of claim 11 , wherein the low-k material has a dielectric constant that has not been increased due to plasma damage.
15. The method of claim 11 , wherein the reaction between the natural oxide film and manganese present in the first cap layer reduces or eliminates the amount of oxidized copper present in the natural oxide film.