Internal power supply circuit, semiconductor device, and manufacturing method of semiconductor device

1. A semiconductor device comprising:

an internal circuit supplied with a power supply voltage;

an internal power supply wiring connected to the internal circuit;

a plurality of power supply units connected in common to the internal power supply wiring to supply the internal circuit with the power supply voltage via the internal power supply wiring;

a control circuit that activates or deactivates each of the power supply units, wherein each of the power supply units includes a driver transistor connected between an external power supply wiring to which an external voltage is supplied and the internal power supply wiring, and the control circuit activates or deactivates each of the power supply unit by turning on or off the driver transistors included therein, and wherein sizes of the driver transistors included in the power supply units are different from each other; and

an operational amplifier including two input terminals that receives the power supply voltage from the internal power supply wiring and a reference potential of the power supply voltage, respectively, wherein

each of the power supply units further includes a first switch element provided between a control electrode of the driver transistor included therein and an output terminal of the operational amplifier, and

the control circuit activates or deactivates each of the power supply units by turning on or off the first switch element thereof.

2. The semiconductor device as claimed in claim 1 , wherein the control circuit controls drive capability of the operational amplifier.

3. The semiconductor device as claimed in claim 2 , wherein the control circuit controls drive capability of the operational amplifier by controlling a value of a bias current of the operational amplifier.

4. The semiconductor device as claimed in claim 3 , wherein

the operational amplifier further includes a plurality of bias current supply units respectively including a bias transistor, and

the control circuit controls an amount of the bias current of the operational amplifier by selecting either activation or deactivation of the bias current supply units.

5. The semiconductor device as claimed in claim 4 , wherein

each of the bias current supply units further includes a second switch element connected in series to the bias transistor included therein, and

the control circuit activates or deactivates each of the bias current supply units by turning on or off the second switch element thereof.

6. The semiconductor device as claimed in claim 2 , wherein the control circuit activates or deactivates each of the power supply units in conjunction with control of drive capability of the operational amplifier.

7. The semiconductor device as claimed in claim 1 , wherein

each of the power supply units includes a capacitor, and

the internal power supply circuit supplies the power supply voltage using one or more capacitors each included in activated one or more of the power supply units.

8. The semiconductor device as claimed in claim 7 , wherein each of the power supply units serves as a pumping circuit that generates the power supply voltage by charging and discharging the capacitor included therein using a periodic signal.

9. The semiconductor device as claimed in claim 8 , wherein

each pumping circuit includes a third switch element connected in series to the capacitor included therein, and

the control circuit activates or deactivates each pumping circuit by turning on or off the third switch element included therein.

10. The semiconductor device as claimed in claim 1 , wherein the control circuit activates or deactivates each of the power supply units based on stored contents of a storage circuit that stores activation information of each of the power supply units.

11. The semiconductor device as claimed in claim 10 , wherein the control circuit further activates or deactivates each of the power supply units based on a test code signal supplied from outside.

12. A semiconductor device comprising:

an internal circuit supplied with a power supply voltage;

an internal power supply wiring connected to the internal circuit;

an oscillator circuit that generates a periodic signal having a predetermined cycle, the predetermined cycle being controlled by drive capability thereof;

a pumping circuit that generates the power supply voltage by charging and discharging one or more capacitors using the periodic signal generated by the oscillator circuit, and supplies the internal circuit with the power supply voltage via the internal power supply wiring; and

a control circuit that controls the drive capability of the oscillator circuit.

13. The semiconductor device as claimed in claim 12 , wherein the control circuit controls drive capability of the oscillator circuit by controlling a value of a bias current of the oscillator circuit.

14. The semiconductor device as claimed in claim 13 , wherein

the oscillator circuit includes a plurality of bias current supply units respectively including a bias transistor, and

the control circuit controls an amount of a bias current of the oscillator circuit by selecting either activation or deactivation of at least a part of the bias current supply units.

15. The semiconductor device as claimed in claim 14 , wherein

each of said at least the part of the bias current supply units the oscillator circuit further includes a fourth switch element connected in series to the bias transistor, and

the control circuit activates or deactivates each of said at least the part of the bias current supply units by turning on or off the fourth switch element thereof.

16. The semiconductor device as claimed in claim 14 , wherein the control circuit activates or deactivates each of said at least the part of the bias current supply units based on stored contents of a storage circuit that stores activation information of each of said at least the part of the bias current supply units.

17. The semiconductor device as claimed in claim 14 , wherein the control circuit activates or deactivates each of said at least the part of the bias current supply units based on a test code signal supplied from outside.

18. A manufacturing method of a semiconductor device having an internal power supply circuit, the internal power supply circuit includes:

a plurality of power supply units connected in common to an internal power supply wiring that supplies a power supply voltage to an internal circuit of the semiconductor device; and

a storage circuit that stores activation information of each of at least a part of the power supply units, wherein

the method comprising:

activating a part or all of the power supply units;

measuring current supply capability of the internal power supply circuit; and

writing the activation information into the storage circuit based on a measurement result.

19. The manufacturing method of a semiconductor device as claimed in claim 18 , wherein the activating includes:

activating a part or all of the power supply units in a state where ambient temperature is set to a first temperature; and

activating a part or all of the power supply units in a state where ambient temperature is set to a second temperature, which is different from the first temperature, wherein

the activation information is written into the storage circuit based on respective measurement results at the first and second temperatures.