Method for providing an electronic lapping guide corresponding to a near-field transducer of an energy assisted magnetic recording transducer
View Patent ↗A method fabricates a transducer having an air-bearing surface (ABS). The method includes providing at least one near-field transducer (NFT) film and providing an electronic lapping guide (ELG) film substantially coplanar with a portion of the at least one NFT film. The method also includes defining a disk portion of an NFT from the portion of the at least one NFT film and at least one ELG from the ELG film. The disk portion corresponds to a critical dimension of the NFT from an ABS location. The method also includes lapping the at least one transducer. The lapping is terminated based on a signal from the ELG.
1. A method for providing at least one transducer having an air-bearing surface (ABS), the method comprising:
providing at least one near-field transducer (NFT) film;
providing an electronic lapping guide (ELG) film substantially coplanar with a portion of the at least one NFT film;
defining a disk portion of an NFT from the portion of the at least one NFT film and at least one ELG from the ELG film, the disk portion corresponding to a critical dimension of the NFT from an ABS location; and
lapping a portion of the at least one transducer including the at least one ELG, the lapping being terminated based on a signal from the at least one ELG.
2. The method of claim 1 wherein the step of defining the disk portion and the at least one ELG further includes:
providing a mask covering the disk portion of the NFT of the at least one NFT film and the at least one ELG of the ELG film; and
removing an exposed portion of the at least one NFT film and an exposed portion of the ELG film.
3. The method of claim 2 wherein the step of providing the mask further includes:
providing a hard mask covering the disk portion and the at least one ELG.
4. The method of claim 3 wherein the step of removing the exposed portion further includes:
ion milling the exposed portion of the at least one NFT film and the exposed portion of the ELG film, the ion milling leaving an exposed remaining portion of the at least one NFT film and an exposed remaining portion of the ELG film.
5. The method of claim 4 further comprising:
providing a pin portion mask on at least the exposed remaining portion of the at least one NFT film; and
defining a pin portion of the NFT, the pin portion having the critical dimension, at least part of the exposed remaining portion of the ELG film being removed.
6. The method of claim 5 wherein the step of defining the pin portion further includes:
performing an ion mill after the pin portion mask has been provided.
7. The method of claim 1 further comprising:
defining a pin portion of the NFT, the pin portion having the critical dimension.
8. The method of claim 1 wherein the disk portion has a circular cross section.
9. The method of claim 1 wherein the disk portion has a non-circular cross section.
10. The method of claim 9 wherein the disk portion has a rectangular cross section.
11. The method of claim 1 wherein the at least one NFT film further includes:
a first gold film;
a Ru film on the first gold film; and
a second gold film on the Ru layer.
12. The method of claim 1 wherein the ELG film includes Cr.
13. A method for providing a transducer having an air-bearing surface (ABS), the method comprising:
providing a near-field transducer (NFT) film stack including a first gold film, a Ru film on the first gold film and a second gold film on the Ru layer;
providing an electronic lapping guide (ELG) film substantially coplanar with the NFT film stack and including Cr;
providing a hard mask covering a disk portion of the NFT film stack and an ELG region of the ELG film;
performing a first ion mill, the first ion mill removing an exposed portion of the second gold layer and part of an exposed portion of the ELG film to form at least the disk portion of a NFT and a portion of the ELG, the first ion mill terminating while a portion of the Ru film and a portion of the ELG film remain intact;
providing a pin portion mask on an exposed portion of the Ru layer of the NFT film stack, the pin portion mask covering a portion of the Ru layer between the disk portion and the ABS, the pin portion mask also exposing an ELG region of the ELG film;
performing a second ion mill, the second ion mill defining a pin portion of the NFT and removing an additional portion of the ELG film outside of the ELG region, the pin portion having the critical dimension;
providing an NFT mask covering the NFT and exposing the ELG region;
removing an exposed region of the ELG film, forming an ELG in the ELG region, the ELG being substantially coplanar with the disk portion of the NFT; and
lapping a portion of the transducer including the ELG, the lapping being terminated based on a signal from the ELG.