THIN-FILM TRANSISTOR ARRAY PANEL AND METHOD OF FABRICATING THE SAME
A thin-film transistor array panel includes: an insulating substrate; an oxide semiconductor layer that is formed on the insulating substrate and includes a metal inorganic salt and zinc acetate; a gate electrode overlapping with the oxide semiconductor layer; a gate insulating film that is interposed between the oxide semiconductor layer and the gate electrode; and a source electrode and a drain electrode that at least partially overlap the oxide semiconductor layer and are separated from each other.
1 . A thin-film transistor array panel, comprising:
a substrate;
an oxide semiconductor layer disposed on the substrate and comprising a metal inorganic salt and zinc acetate;
a gate electrode overlapping with the oxide semiconductor layer;
a gate insulating film disposed between the oxide semiconductor layer and the gate electrode; and
a source electrode and a drain electrode disposed to at least partially overlap the oxide semiconductor layer and separated from each other.
2 . The panel of claim 1 , wherein the metal inorganic salt comprises at least one metal selected from lithium (Li), sodium (Na), potassium (K), rubidium (Rb), cesium (Cs), beryllium (Be), magnesium (Mg), calcium (Ca), strontium (Sr), barium (Ba), titanium (Ti), zirconium (Zr), hafnium (Hf), vanadium (V), niobium (Nb), tantalum (Ta), chromium (Cr), molybdenum (Mo), tungsten (W), manganese (Mn), technetium (Tc), rhenium (Re), iron (Fe), ruthenium (Ru), osmium (Os), cobalt (Co), rhodium (Rh), iridium (Ir), nickel (Ni), palladium (Pd), platinum (Pt), copper (Cu), silver (Ag), gold (Au), cadmium (Cd), mercury (Hg), boron (B), aluminum (Al), gallium (Ga), indium (In), thallium (Tl), silicon (Si), germanium (Ge), tin (Sn), lead (Pb), phosphorus (P), arsenic (As), antimony (Sb), and bismuth (Bi).
3 . The panel of claim 1 , wherein the metal organic salt comprises at least one inorganic salt selected from fluorine (F), chlorine (Cl), bromine (Br), iodine (I), NO 3 , SO 4 , PO 4 , C 2 O 4 , ClO 4 , and BF 4 .
4 . The panel of claim 1 , wherein the oxide semiconductor layer is a coated layer comprising a metal compound solution comprising the metal inorganic salt and the zinc acetate.
5 . The panel of claim 4 , wherein the metal compound solution further comprises a stabilizer.
6 . The panel of claim 5 , wherein the stabilizer comprises at least one of diketone, amino alcohol, and polyamine.
7 . The panel of claim 6 , wherein the diketone comprises acetylacetone.
8 . The panel of claim 4 , wherein a solvent of the metal compound solution comprises alcohol.
9 . A method of fabricating a thin-film transistor array panel, the method comprising:
forming an oxide semiconductor layer comprising a metal inorganic salt and zinc acetate on a substrate;
forming a gate electrode overlapping with the oxide semiconductor layer;
forming a gate insulating film, the gate insulating film being disposed between the oxide semiconductor layer and the gate electrode; and
forming a source electrode and a drain electrode to at least partially overlap the oxide semiconductor layer and to be separated from each other.
10 . The method of claim 9 , wherein the metal inorganic salt comprises at least one metal selected from lithium (Li), sodium (Na), potassium (K), rubidium (Rb), cesium (Cs), beryllium (Be), magnesium (Mg), calcium (Ca), strontium (Sr), barium (Ba), titanium (Ti), zirconium (Zr), hafnium (Hf), vanadium (V), niobium (Nb), tantalum (Ta), chromium (Cr), s molybdenum (Mo), tungsten (W), manganese (Mn), technetium (Tc), rhenium (Re), iron (Fe), ruthenium (Ru), osmium (Os), cobalt (Co), rhodium (Rh), iridium (Ir), nickel (Ni), palladium (Pd), platinum (Pt), copper (Cu), silver (Ag), gold (Au), cadmium (Cd), mercury (Hg), boron (B), aluminum (Al), gallium (Ga), indium (In), thallium (Tl), silicon (Si), germanium (Ge), tin (Sn), lead (Pb), phosphorus (P), arsenic (As), antimony (Sb), and bismuth (Bi).
11 . The method of claim 9 , wherein the metal organic salt comprises at least one inorganic salt selected from fluorine (F), chlorine (Cl), bromine (Br), iodine (I), NO 3 , SO 4 , PO 4 , C 2 O 4 , ClO 4 , and BF 4 .
12 . The method of claim 9 , wherein forming the oxide semiconductor layer comprises coating a metal compound solution comprising the metal inorganic salt and the zinc acetate on the substrate.
13 . The method of claim 12 , wherein coating the metal compound solution comprises spin coating, dip coating, bar coating, screen printing, slide coating, roll coating, spray coating, slot coating, dip-pen, inkjet, and nano-dispensing methods.
14 . The method of claim 12 , wherein forming the oxide semiconductor layer further comprises heat-treating the metal compound solution after coating the metal compound solution on the substrate.
15 . The method of claim 14 , wherein the heat-treating of the metal compound solution is performed at a temperature in a range from about 100 to about 500° C.
16 . The method of claim 12 , wherein the metal compound solution further comprises a stabilizer.
17 . The method of claim 16 , wherein the stabilizer comprises at least one of diketone, amino alcohol, and polyamine.
18 . The method of claim 17 , wherein the diketone comprises acetylacetone.
19 . The method of claim 17 , wherein the amino alcohol comprises at least one of ethanolamine, diethanolamine, and triethanolamine.
20 . The method of claim 17 , wherein the polyamine comprises at least one of ethylenediamine and 1,4-diaminobutane.
21 . The method of claim 12 , wherein a solvent of the metal compound solution comprises alcohol.