Semiconductor on semiconductor substrate multi-chip-scale package
View Patent ↗Some exemplary embodiments of a multi-chip semiconductor package utilizing a semiconductor substrate and related method for making such a semiconductor package have been disclosed. One exemplary embodiment comprises a first semiconductor device including, on a surface thereof, a first patterned dielectric layer, a conductive redistribution layer, a second patterned dielectric layer, and a second semiconductor device. The conductive redistribution layer connects to a first and a second patterned conductive attach material for connecting the first and second semiconductor devices to provide coplanar electrical connections for mounting on a printed circuit board. In one embodiment, the first semiconductor device is a diode having anode and cathode contacts on an upper surface thereof, and the second semiconductor device is an IGBT.
1. A semiconductor package comprising:
a first semiconductor device;
a first patterned dielectric layer, a conductive redistribution layer in electrical contact with said first semiconductor device, and a second patterned dielectric layer disposed on said first semiconductor device;
said conductive redistribution layer being selectively coupled to a first patterned conductive attach material;
a second semiconductor device being in electrical contact with said first patterned conductive attach material;
a second patterned conductive attach material formed over said second semiconductor device, a first layer of said second patterned conductive attach material selectively coupled to said conductive redistribution layer, a second layer of said second patterned conductive attach material selectively coupled to said second semiconductor device;
a height of said first layer of said second patterned conductive attach material substantially coplanar with a height of said second layer of said second patterned conductive attach material so as to be together mechanically and electrically connectable to a printed circuit board.
2. The semiconductor package of claim 1 , wherein said first patterned conductive attach material is selected from the group consisting of solder balls, solder bumps, and a solder pre-form.
3. The semiconductor package of claim 1 , wherein said second patterned conductive attach material is selected from the group consisting of solder balls, solder bumps, and a solder pre-form.
4. The semiconductor package of claim 1 , wherein said conductive redistribution layer comprises copper.
5. The semiconductor package of claim 1 , wherein said first semiconductor device is a diode.
6. The semiconductor package of claim 5 , wherein said diode includes an anode contact disposed on an upper surface of said diode and a cathode contact disposed around a perimeter of said anode contact.
7. The semiconductor package of claim 6 , wherein said cathode contact is electrically connectable to said printed circuit board through said conductive redistribution layer and said first patterned conductive attach material.
8. The semiconductor package of claim 6 , wherein said anode contact is electrically connectable to said printed circuit board through said second semiconductor device and said second patterned conductive attach material.
9. The semiconductor package of claim 1 , wherein said second semiconductor device is an IGBT.
10. The semiconductor package of claim 9 , wherein said IGBT includes a gate contact and an emitter contact on a lower surface of said IGBT and a collector contact on an upper surface of said IGBT.
11. The semiconductor package of claim 10 , wherein said gate contact is electrically connectable to said printed circuit board through said conductive redistribution layer and said first patterned conductive attach material.
12. The semiconductor package of claim 10 , wherein said emitter contact is electrically connectable to said printed circuit board through said conductive redistribution layer and said first patterned conductive attach material.
13. The semiconductor package of claim 10 , wherein said collector contact is electrically connectable to said printed circuit board through said second patterned conductive attach material.