Nitride semiconductor laser device and wafer
View Patent ↗Provided is a nitride semiconductor laser device that is reduced in capacitance to have a better response. The nitride semiconductor laser device includes: an active layer; an upper cladding layer which is stacked above the active layer; a low dielectric constant insulating film which is stacked above the upper cladding layer; and a pad electrode which is stacked above the low dielectric constant insulating film.
1. A wafer, comprising a plurality of nitride semiconductor laser devices which are to be separated from one another,
wherein the plurality of nitride semiconductor laser devices each comprise at least one pad electrode that is electrically isolated, and
wherein, of the plurality of nitride semiconductor laser devices, at least nitride semiconductor laser devices that differ from one another in structure have an equal area on a pad electrode to which a voltage is applied, and have different overall pad electrode shapes on pad electrodes including both the pad electrode to which the voltage is applied and a pad electrode to which no voltage is applied.
2. A wafer according to claim 1 , wherein the at least one pad electrode is electrically isolated by a groove.
3. A nitride semiconductor laser device, which is obtained by breaking the wafer according to claim 1 into pieces.