Nitride semiconductor light emitting device
View Patent ↗A nitride semiconductor light emitting device includes a first coat film of aluminum nitride or aluminum oxynitride formed at a light emitting portion and a second coat film of aluminum oxide formed on the first coat film. The thickness of the second coat film is at least 80 nm and at most 1000 nm. Here, the thickness of the first coat film is preferably at least 6 nm and at most 200 nm.
1. A nitride semiconductor light emitting device comprising:
a light emitting side;
a light reflecting side;
a film of aluminum nitride or aluminum oxynitride formed at a facet of each of the light emitting side and light reflecting side; and
an oxide film having a thickness of at least 80 nm and at most 1000 nm formed on said film of aluminum nitride or aluminum oxynitride,
wherein said film of aluminum oxynitride has an oxygen content of at most 20 atomic %, and a thickness of said film of aluminum nitride or aluminum oxynitride is at least 12 nm and at most 200 nm.
2. The nitride semiconductor light emitting device according to claim 1 , wherein said oxide film is an oxide of an element selected from the group consisting of aluminum, silicon, and titanium.
3. The nitride semiconductor light emitting device according to claim 1 , wherein the thickness of said film of aluminum nitride or aluminum oxynitride is at least 50 nm and at most 200 nm.
4. The nitride semiconductor light emitting device according to claim 1 , wherein the thickness of said oxide film is at least 160 nm and at most 1000 nm.
5. The nitride semiconductor light emitting device according to claim 1 , wherein the film of aluminum nitride or aluminum oxynitride directly contacts nitride semiconductor layers forming the light emitting side and light reflecting side of the nitride semiconductor light emitting device.