Display device and manufacturing method thereof
View Patent ↗An etching resist including first and second portions, the first portion being thicker than the second portion, is formed on a metallic layer. Through the etching resist, a semiconductor layer and the metallic layer are patterned by etching so as to form a wiring from the metallic layer and leave the semiconductor layer under the wiring. An electrical test is conducted on the wiring. The second portion is removed while the first portion is left unremoved. Selective etching is performed through the first portion so as to leave the semiconductor layer unetched to pattern the wiring to be divided into drain and source electrodes. A substrate is cut. In patterning the wiring, the wiring is etched to be cut at a position closer to a cutting line of the substrate with respect to the drain and source electrodes, while leaving the semiconductor layer unetched.
1. A manufacturing method for a display device, comprising:
(a) forming a semiconductor layer above a substrate;
(b) forming a metallic layer on the semiconductor layer;
(c) forming, on the metallic layer, an etching resist comprising a first portion and a second portion, the first portion being thicker than the second portion;
(d) etching and patterning the semiconductor layer and the metallic layer through the etching resist so as to form a wiring from the metallic layer and leave the semiconductor layer under the wiring;
(e) conducting an electrical test on the wiring;
(f) thinning the etching resist to remove the second portion while leaving the first portion unremoved;
(g) performing selective etching through the first portion, which is left unremoved, so as to leave the semiconductor layer unetched, to thereby pattern the wiring to be divided into a drain electrode and a source electrode; and
(h) cutting the substrate,
wherein the step (g) of patterning the wiring comprises etching the wiring to be cut at a position closer to a cutting line of the substrate with respect to the drain electrode and the source electrode, while leaving the semiconductor layer unetched.
2. The manufacturing method for a display device according to claim 1 , further comprising:
(i) forming a passivation film over the wiring before the step (h) cutting the substrate and after the step (g) of patterning the wiring; and
(j) etching the passivation film to form a through hole in the passivation film, which is used for establishing electrical connection to the wiring,
wherein the step (j) of etching the passivation film comprises etching the passivation film and the semiconductor layer so that one of a passing through hole and a notch is formed in the passivation film at the position closer to the cutting line of the substrate with respect to the drain electrode and the source electrode, and that the semiconductor layer is cut, which is left unetched after the wiring is cut.
3. The manufacturing method for a display device according to claim 2 , wherein the passivation film comprises one of an SiO 2 film and an SiN film.
4. A display device, comprising:
a substrate;
a semiconductor layer formed above the substrate;
a wiring formed in part on the semiconductor layer; and
a passivation film covering an upper surface of each of the semiconductor layer and the wiring,
wherein the semiconductor layer comprises a first portion and a second portion, the first portion being located under the wiring, the second portion protruding from the wiring from the first portion along a longitudinal direction of the wiring,
wherein the passivation film comprises one of a passing through hole and a notch formed therein, and
wherein the second portion of the semiconductor layer has a leading end side surface, which is flush with a plane of the one of the passing through hole and the notch extending perpendicular to the substrate.
5. The display device according to claim 4 , wherein the passivation film comprises one of an SiO 2 film and an SiN film.