Method of fabricating epitaxial structures
View Patent ↗A method of fabricating epitaxial structures including applying an etch stop to one side of a substrate and then growing at least one epitaxial layer on a first side of said substrate, flipping the substrate, growing a second etch stop and at least one epitaxial layer on a second side of the substrate, applying a carrier medium to the ultimate epitaxial layer on each side, dividing the substrate into two parts generally along an epitaxial plane to create separate epitaxial structures, removing any residual substrate and removing the etch stop.
1. A method of fabricating epitaxial structures, the method comprising:
growing a first etch stop on a first side of a substrate;
growing at least one epitaxial layer on the first side of the substrate;
flipping the substrate;
growing a second etch stop on a second side of the substrate;
growing at least one epitaxial layer on the second side of the substrate;
applying a carrier medium to the first and second sides of the substrate;
dividing the substrate into two parts generally along an epitaxial plane to create a first epitaxial structure and a second epitaxial structure;
removing residual substrate from the first and second epitaxial structures; and
removing the first and second etch stops.
2. The method of claim 1 , wherein the first and second epitaxial structures comprise solar cells.
3. The method of claim 2 , wherein the solar cells comprise inverted metamorphic structures.
4. The method of claim 2 , wherein the solar cells comprise inverted triple junction tandem solar cells.
5. The method of claim 4 , wherein each solar cell comprises a top layer, a middle layer and a bottom layer, the top layer and the middle layer having matching lattice structures, the middle layer and the bottom layer not having matching lattice structures.
6. The method of claim 5 , wherein the bottom layer comprises InGaAs, the middle layer comprises GaAs, and the top layer comprises InGaP.
7. The method of claim 5 , wherein the bottom layer has a bandgap of approximately 1 eV, the middle layer has a bandgap of approximately 1.42 eV, and the top layer has a bandgap of approximately 1.9 eV.
8. The method of claim 1 , wherein the carrier medium comprises at least one of silicon, metal, and glass.
9. The method of claim 8 , wherein the carrier medium comprises at least one of gold, silver, copper, nickel, titanium, and platinum.
10. The method of claim 1 , wherein dividing the substrate into two parts comprises cutting the substrate using a wire saw or a laser.
11. The method of claim 1 , wherein each of the first and second epitaxial structures comprises an array of individual cells.
12. The method of claim 11 , further comprising separating the array of individual cells of each of the first and second epitaxial structures into the individual cells.