Ion generating apparatus and method of removing a fluorine compound deposited in a source housing thereof
View Patent ↗Provided is an ion generating apparatus. The ion generating apparatus includes opposed electrodes connected to a high-frequency power supply, and hence, even in a case where a cathode filament is broken, hydride gas can be ionized to generate hydrogen ion. Thus, a fluorine compound deposited in a source housing is reduced in vacuum, and gas containing fluorine generated due to the above-mentioned reduction reaction is discharged with a vacuum pump.
1. A method of removing a fluorine compound deposited in a source housing of an ion generating apparatus after a filament of the apparatus breaks during an ion implantation process using a fluorine compound gas,
the ion generating apparatus comprising:
a chamber;
a filament arranged within the chamber for generating thermal electrons;
a direct-current power supply connected in series to the filament;
a gas introduction port for introducing gas into the chamber;
an ion beam take-out port for taking out ions generated within the chamber to outside the chamber;
opposed electrodes provided at both ends of the filament and electrically connected in series with the filament, each of the electrodes being arranged between the direct-current power supply and the filament; and
a high-frequency power supply arranged in parallel to the direct-current power supply, the ion generating apparatus allowing connection between the direct-current power supply and the opposed electrodes and connection between the high-frequency power supply and the opposed electrodes to be selected with a switch,
the method comprising:
disconnecting the direct-current power supply from the opposed electrodes and connecting the opposed electrodes and the high-frequency power supply to each other after breakage of the filament;
introducing a hydride gas through the gas introduction port;
applying high frequency power to the opposed electrodes to ionize the hydride gas, to thereby generate hydrogen ions; and
discharging the hydrogen ions through the ion beam take-out port into the source housing, reducing the fluorine compound deposited within the source housing, and discharging gas containing generated fluorine with a vacuum pump,
whereby during ion implantation using fluorine compound gas, the deposited fluorine compound is removed through ionizing the hydride gas under a condition in which the filament is broken.
2. An ion generating apparatus having a source housing on which a fluorine compound deposits during use of the apparatus, comprising:
a chamber;
a filament arranged within the chamber for generating thermal electrons;
a direct-current power supply connected in series to the filament;
a gas introduction port for introducing gas into the chamber;
an ion beam take-out port for taking out ions generated within the chamber to outside the chamber;
opposed electrodes provided at both ends of the filament and electrically connected in series with the filament, each of which is arranged between the direct-current power supply and the filament; and
a high-frequency power supply arranged in parallel to the direct-current power supply, the ion generating apparatus allowing connection between the direct-current power supply and the opposed electrodes and connection between the high-frequency power supply and the opposed electrodes to be selected with a switch.