Semiconductor device
View Patent ↗Provided is a LOCOS offset MOS field-effect transistor in which a first lightly-doped N-type drain offset region with a LOCOS oxide film and a second lightly-doped N-type drain offset region without a LOCOS oxide film are formed in a drain-side offset region, and both the regions are covered with a gate electrode. Provision of the first lightly-doped N-type drain offset region mitigates an electric field applied to the first lightly-doped N-type drain offset region to increase a breakdown voltage. Provision of the second lightly-doped N-type drain offset region increases carriers within the second lightly-doped N-type drain offset region to obtain a high current drivability.
1. A semiconductor device, comprising:
a semiconductor substrate of a first conductivity type;
a first well region of a first conductivity type formed in a surface of the semiconductor substrate;
a second well region of a second conductivity type formed in the surface of the semiconductor substrate and in contact with the first well region;
a heavily-doped source region of a second conductivity type formed on the first well region;
a lightly-doped source offset region of a second conductivity type formed on the first well region and in contact with the heavily-doped source region;
a channel formation region configured on the fist well region and next to the heavily-doped source region;
a heavily-doped drain region of a second conductivity type formed on the second well region;
a first lightly-doped drain offset region of a second conductivity type formed on the second well region so as to be spaced away from the lightly-doped source offset region by a length of the channel formation region;
a second lightly-doped drain offset region of a second conductivity type formed between the heavily-doped drain region and the first lightly-doped drain offset region and in contact with both of them;
a LOCOS oxide film formed in a surface portion of the semiconductor substrate, the LOCOS oxide film comprising a first LOCOS oxide region formed on the lightly-doped source offset region and a second LOCOS oxide region formed on the first lightly-doped drain offset region;
a gate oxide film formed on:
a part of the first LOCOS oxide region formed in contact with the channel formation region on a source side,
the channel formation region,
an entirety of the second LOCOS oxide region formed in contact with the channel formation region on a drain side, and
the second lightly-doped drain offset region;
a gate electrode formed on the gate oxide film;
a source electrode formed on the heavily-doped source region; and
a drain electrode formed on the heavily-doped drain region.
2. A semiconductor device, comprising:
a semiconductor substrate of a first conductivity type;
a first well region of a first conductivity type formed in a surface of the semiconductor substrate;
a second well region of a second conductivity type formed in the surface of the semiconductor substrate and in contact with the first well region;
a heavily-doped source region of a second conductivity type formed on the first well region;
a lightly-doped source offset region of a second conductivity type formed on the first well region and in contact with the heavily-doped source region;
a channel formation region configured on the fist well region and next to the heavily-doped source region;
a first lightly-doped drain offset region of a second conductivity type formed on the second well region so as to be spaced away from the lightly-doped source offset region by a length of the channel formation region;
a second drain offset region of a second conductivity type formed on the second well region and next to the first lightly-doped drain offset region;
a heavily-doped drain region of a second conductivity type formed on the second well region so as to be spaced away from the first well region by lengths of the lightly-doped first drain offset region and the second drain offset region;
a LOCOS oxide film formed in a surface portion of the semiconductor substrate, the LOCOS oxide film comprising a first LOCOS oxide region formed on the lightly-doped source offset region and a second LOCOS oxide region formed on the first lightly-doped drain offset region;
a gate oxide film which is formed on:
a part of the first LOCOS oxide region formed in contact with the channel formation region on a source side,
the channel formation region,
an entirety of the second LOCOS oxide region formed in contact with the channel formation region on a drain side, and
the second drain offset region;
a gate electrode formed on the gate oxide film;
a source electrode formed on the heavily-doped source region; and
a drain electrode formed on the heavily-doped drain region.