Apparatus and method for reducing pixel operational voltage in MEMS-based optical displays
View Patent ↗Embodiments of a display comprising pixels formed from suitably tethered deformable membrane-based MEMS subsystems are provided that include the means to dynamically alter the in-plane tension, and thus the effective spring constant, of the deformable membrane being ponderomotively propelled between active and inactive optical states, said dynamic alteration being effected by exploiting transverse piezoelectric properties of the deformable membranes. Manipulating the spring constant can reduce the actuation force required to turn pixels on, thus significantly reducing the operational voltages for the display composed of an array of such subsystems. Since display power rises with the square of the pixel drive voltage, such architectures give rise to more power efficient display systems.
1. A system comprising:
a light guide;
a first conductor layer;
a second conductor layer;
a deformable membrane layer comprising a piezoelectric material, wherein at least a portion of the deformable membrane layer is positioned between the first conductor layer and the second conductor layer;
the second conductor layer comprising optical microstructures, the second conductor layer being transparent at least proximate to an aperture of each optical microstructure through which light is coupled out of the light guide when the deformable membrane layer is deflected towards the light guide;
and the system further comprising a third conductor layer positioned proximate the light guide, a gap existing between the second conductor layer and the third conductor layer, and the second conductor layer being positioned between the first conductor layer and the third conductor layer;
the system being arranged such that an electrical potential difference applied between the second conductor layer and the third conductor layer causes the deformable membrane layer to deflect towards the light guide.
2. The system of claim 1 , wherein the deformable membrane layer has a transverse piezoelectric property.
3. The system of claim 1 , wherein the first conductor layer is embedded in the deformable membrane layer such that a first portion of the deformable membrane layer is positioned on a first side of the first conductor layer and a second portion of the deformable membrane layer is positioned on a second side of the first conductor layer and between the first conductor layer and the second conductor layer.
4. The system of claim 1 , comprising a slip cover configured to urge the deformable membrane layer to preferentially deflect toward the light guide.
5. The system of claim 1 , wherein the deformable membrane layer expands in a direction generally transverse to the direction of an electric field applied between the first conductor layer and the second conductor layer.
6. The system of claim 1 , wherein the optical microstructures generally have a pyramidal frustum, a conical frustum or a parabolic frustum geometry.
7. The system of claim 1 , wherein the optical microstructures are transparent.
8. The system of claim 1 , wherein the entire second conductor layer is transparent.
9. A method comprising:
positioning at least a portion of a deformable membrane layer between a first conductor layer and a second conductor layer, the deformable membrane layer comprising a piezoelectric material, and the second conductor layer comprising optical microstructures, the second conductor layer being transparent at least proximate to an aperture of each optical microstructure through which light is coupled out of the light guide when the deformable membrane layer is deflected towards the light guide;
positioning a third conductor layer proximate the light guide;
providing a gap between the second conductor layer and the third conductor layer; and
applying an electrical potential difference between the second conductor layer and the third conductor layer to cause the deformable membrane layer to deflect towards the light guide.
10. The method of claim 9 , wherein the deformable membrane layer has a transverse piezoelectric property.
11. The method of claim 10 , wherein the optical microstructures are transparent.
12. The method of claim 10 , wherein the entire second conductor is transparent.
13. The method of claim 9 , wherein the deformable membrane layer expands in a direction generally transverse to the direction of an electric field applied between the first conductor layer and the second conductor layer.
14. The method of claim 9 , further comprising embedding the first conductor layer in the deformable membrane layer such that a first portion of the deformable membrane layer is positioned on a first side of the first conductor layer and a second portion of the deformable membrane layer is positioned on a second side of the first conductor layer and between the first conductor layer and the second conductor layer.