IP Library › Patent Application 12808241
Patent Application
App. No. 12/808,241

MEMS MICROPHONE

Loading inventors, assignments & file history…
Monitor This Case
Get email alerts when status or documents change.
Order Certified Copies
Most orders are placed with the USPTO same day — all within 24 business hours.
Order via The Patent Place →
Pre-filled with this patent's details
Quick Facts
Patent No.
US None
App. No.
12/808,241
Abstract

A MEMS microphone ( 100 ) is disclosed comprising: a substrate ( 101 ), a membrane ( 102 ) attached to the substrate ( 101 ), and an electrode ( 104 ) attached to the substrate ( 101 ), wherein the membrane ( 102 ) and the electrode ( 104 ) have the same resonance frequency.

Claims (18)

1 . A MEMS microphone comprising:

a substrate,

a membrane attached to the substrate, and

an electrode attached to the substrate,

wherein the membrane and the electrode have a same resonance frequency.

2 . The MEMS microphone according to claim 1 , wherein the electrode is a back-electrode.

3 . The MEMS microphone according to claim 1 , wherein the MEMS microphone is a capacity type MEMS microphone.

4 . The MEMS microphone according to claim 1 , further comprising an elastic suspension arranged between the electrode and the substrate.

5 . The MEMS microphone according to claim 4 , wherein the elastic suspension comprises a material having a lower Young's modulus than a Young's modulus of at least one of the electrode and the substrate.

6 . The MEMS microphone according to claim 4 , wherein the elastic suspension is adapted such that the membrane and the electrode have a same resonant frequency.

7 . The MEMS microphone according to claim 4 , wherein at least two of the elastic suspension and the electrode and the substrate comprise a same material.

8 . The MEMS microphone according to claim 1 , wherein the membrane and the electrode comprise a same material.

9 . The MEMS microphone according to claim 1 , wherein at least one of the membrane and the electrode comprises silicone.

10 . The MEMS microphone according to claim 1 , wherein the MEMS microphone is based on one detection mechanism of the group of detection mechanisms consisting of:

an optical detection mechanism,

an electret mechanism,

an electromechanic mechanism, and

an electrodynamic mechanism.

Assignments (12)
CORRECTIVE ASSIGNMENT TO CORRECT THE REMOVE APPLICATION 12298143 PREVIOUSLY RECORDED ON REEL 042762 FRAME 0145. ASSIGNOR(S) HEREBY CONFIRMS THE SECURITY AGREEMENT SUPPLEMENT. Recorded Oct 22, 2019
From: NXP B.V.
To: MORGAN STANLEY SENIOR FUNDING, INC.
Reel/Frame 051145/0184 →
CORRECTIVE ASSIGNMENT TO CORRECT THE REMOVE APPLICATION 12298143 PREVIOUSLY RECORDED ON REEL 038017 FRAME 0058. ASSIGNOR(S) HEREBY CONFIRMS THE SECURITY AGREEMENT SUPPLEMENT. Recorded Oct 22, 2019
From: NXP B.V.
To: MORGAN STANLEY SENIOR FUNDING, INC.
Reel/Frame 051030/0001 →
CORRECTIVE ASSIGNMENT TO CORRECT THE REMOVE APPLICATION 12298143 PREVIOUSLY RECORDED ON REEL 039361 FRAME 0212. ASSIGNOR(S) HEREBY CONFIRMS THE SECURITY AGREEMENT SUPPLEMENT. Recorded Oct 22, 2019
From: NXP B.V.
To: MORGAN STANLEY SENIOR FUNDING, INC.
Reel/Frame 051029/0387 →
CORRECTIVE ASSIGNMENT TO CORRECT THE REMOVE APPLICATION 12298143 PREVIOUSLY RECORDED ON REEL 042985 FRAME 0001. ASSIGNOR(S) HEREBY CONFIRMS THE SECURITY AGREEMENT SUPPLEMENT. Recorded Oct 22, 2019
From: NXP B.V.
To: MORGAN STANLEY SENIOR FUNDING, INC.
Reel/Frame 051029/0001 →
RELEASE OF SECURITY INTEREST Recorded Sep 10, 2019
From: MORGAN STANLEY SENIOR FUNDING, INC.
To: NXP B.V.
Reel/Frame 050745/0001 →
CORRECTIVE ASSIGNMENT TO CORRECT THE REMOVE APPLICATION 12681366 PREVIOUSLY RECORDED ON REEL 038017 FRAME 0058. ASSIGNOR(S) HEREBY CONFIRMS THE SECURITY AGREEMENT SUPPLEMENT. Recorded May 9, 2017
From: NXP B.V.
To: MORGAN STANLEY SENIOR FUNDING, INC.
Reel/Frame 042985/0001 →
CORRECTIVE ASSIGNMENT TO CORRECT THE REMOVE APPLICATION 12681366 PREVIOUSLY RECORDED ON REEL 039361 FRAME 0212. ASSIGNOR(S) HEREBY CONFIRMS THE SECURITY AGREEMENT SUPPLEMENT. Recorded May 9, 2017
From: NXP B.V.
To: MORGAN STANLEY SENIOR FUNDING, INC.
Reel/Frame 042762/0145 →
PATENT RELEASE Recorded Aug 17, 2016
From: MORGAN STANLEY SENIOR FUNDING, INC.
To: NXP B.V.
Reel/Frame 039707/0471 →
CORRECTIVE ASSIGNMENT TO CORRECT THE REMOVE APPLICATION 12092129 PREVIOUSLY RECORDED ON REEL 038017 FRAME 0058. ASSIGNOR(S) HEREBY CONFIRMS THE SECURITY AGREEMENT SUPPLEMENT. Recorded Jul 14, 2016
From: NXP B.V.
To: MORGAN STANLEY SENIOR FUNDING, INC.
Reel/Frame 039361/0212 →
SECURITY AGREEMENT SUPPLEMENT Recorded Mar 7, 2016
From: NXP B.V.
To: MORGAN STANLEY SENIOR FUNDING, INC.
Reel/Frame 038017/0058 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Jul 28, 2011
From: NXP B.V.
To: KNOWLES ELECTRONICS ASIA PTE. LTD.
Reel/Frame 026665/0310 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Jun 16, 2010
From: RENNER, HEINZ
To: NXP, B.V.
Reel/Frame 024546/0427 →