Method of manufacturing flat panel display
View Patent ↗The present invention relates to a method for manufacturing a flat panel display. Herein, the same mask is used to form contact holes and pixel electrodes in the display substrate. Hence, the number of masks needed for manufacturing the flat panel display can be reduced to decrease the manufacturing cost.
1. A method for manufacturing a flat panel display, employed on a display substrate comprising a metal layer, a dielectric layer and an insulating layer disposed between the metal layer and the dielectric layer and comprising the following steps:
forming a photoresist layer on the display substrate;
performing a first exposure process on the photoresist layer by a mask to define a first region, a second region and a third region on the display substrate;
removing part of the photoresist layer in the first region;
etching part of the dielectric layer in the first region;
removing part of the photoresist layer in the second region;
forming an electrode layer on the display substrate; and
removing the remained photoresist layer; and
wherein the mask comprises a substrate, a first material layer and a second material layer, the first material layer and the second material layer are disposed on the substrate to define a fourth region, a fifth region and a sixth region, the fourth region corresponds to the first region, the fifth region corresponds to the second region, and the sixth region corresponds to the third region.
2. The method for manufacturing a flat panel display according to claim 1 , wherein the fourth region, the fifth region and the sixth region have different transparency to each other.
3. The method for manufacturing a flat panel display according to claim 1 , wherein the mask is a halftone mask.
4. The method for manufacturing a flat panel display according to claim 1 , wherein the material of the photoresist layer is a positive photoresist.
5. The method for manufacturing a flat panel display according to claim 1 , wherein the material of the photoresist layer is a negative photoresist.
6. The method for manufacturing a flat panel display according to claim 1 , wherein part of the metal layer is disposed in the first region.
7. The method for manufacturing a flat panel display according to claim 1 , wherein part of the photoresist layer in the second region is removed by a plasma asking process.
8. The method for manufacturing a flat panel display according to claim 1 , wherein part of the photoresist layer in the third region is removed by a lift-off process.
9. The method for manufacturing a flat panel display according to claim 1 , further comprising a step for removing part of the insulating layer in the first region before removing part of the photoresist layer in the second region.