Methods for forming selectively deposited thin films
View Patent ↗A method for selectively depositing a thin film structure on a substrate is provided. The method includes providing a process gas to a surface of the substrate and directing concentrated electromagnetic energy from a source of energy to at least a portion of the surface. The process gas is decomposed onto the substrate to form a selectively deposited thin film structure.
1. A method for selectively depositing a thin film structure on a substrate, the method comprising:
depositing a plurality of thin film layers on the substrate, the thin film layers including a first conductive layer, a first semiconductor layer, and a second semiconductor layer;
providing a process gas at the plurality of thin film layers;
directing concentrated electromagnetic energy from a source of energy towards the plurality of thin film layers;
forming a scribe line in the plurality of thin film layers with the concentrated electromagnetic energy, the scribe line extending through at least a portion of the first semiconductor layer and the second semiconductor layer; and
decomposing the process gas with the concentrated electromagnetic energy to form a selectively deposited thin film structure on the substrate within the scribe line.
2. The method of claim 1 , further comprising:
depositing a first portion of a second conductive layer onto the second semiconductor layer prior to said step of directing; and
depositing a second portion of the second conductive layer onto the first portion of the second conductive layer after said step of decomposing.
3. The method of claim 2 , wherein the first portion of the second conductive layer comprises graphite.
4. The method of claim 3 , further comprising:
depositing a second conductive layer onto the second semiconductor layer; and
forming a third scribe line in the plurality of thin film layers after said step of directing, the third scribe line extending through at least a portion of the first semiconductor layer, the second semiconductor layer, and the second conductive layer.
5. The method of claim 2 , wherein the second portion of the second conductive layer comprises metal alloy.
6. The method of claim 1 , wherein the scribe line is a second scribe line;
the method further comprising:
forming a first scribe line in the plurality of thin film layers prior to said step of directing, the first scribe line extending through at least a portion of the first conductive layer, the first semiconductor layer, and the second semiconductor layer.
7. The method of claim 6 , wherein the thin film structure includes a metal selected from the group consisting of indium, cadmium, tin, zinc and combinations thereof.
8. The method of claim 1 , wherein the thin film structure comprises a metal.
9. The method of claim 8 , wherein the organometallic gas is selected from the group consisting of tin tetrachloride, dimethyl cadmium, dimethyl zinc, trimethyl indium and combinations thereof.
10. The method of claim 1 , wherein the process gas is an organometallic gas.
11. The method of claim 1 , wherein the source of energy is selected from the group consisting of laser, radio frequency, electron beam, ion beam, infrared source and combinations thereof.
12. The method of claim 11 , wherein the plurality of thin films further comprises a buffer layer between the first conductive layer and the first semiconductor layer.
13. The method of claim 1 , wherein the thin film structure has a greater conductivity than the first conductive layer.
14. The method of claim 1 , wherein the first conductive layer is on the substrate, the first semiconductor layer is on the first conductive layer, and the second semiconductor layer is on the first semiconductor layer.
15. A method for selectively depositing a thin film structure on a substrate, the method comprising:
depositing a plurality of thin film layers on the substrate, the thin film layers including a transparent conductive oxide (TCO) layer, a cadmium sulfide (CdS) layer, and a cadmium telluride (CdTe) layer;
providing an organometallic process gas at the plurality of thin film layers;
directing concentrated electromagnetic energy from a source of energy towards the plurality of thin film layers;
forming a scribe line in the plurality of thin film layers with the concentrated electromagnetic energy, the scribe line extending through at least a portion of the CdS layer and the CdTe layer; and
decomposing the organometallic process gas with the concentrated electromagnetic energy to form a selectively deposited thin film structure on the TCO layer, wherein the selectively deposited thin film structure comprises a metal.