Corner chamber with heater
View Patent ↗A disk processing system with a corner chamber having a heater assembly and a carrier rotary assembly configured to rotate the heater assembly.
1. A disk processing system, comprising:
a corner chamber comprising:
a mounting assembly, comprising:
a mounting plate;
a mounting post coupled to the mounting plate; and
a first heater holder coupled to the mounting post, wherein the first and second heater elements are coupled to the first heater holder;
a heater assembly coupled to the mounting assembly, wherein the heater assembly comprise a first heating element, a second heating element, a third heating element and a fourth heating element;
a first shield disposed between the first heating element and the first heater holder;
a second shield disposed between the second heating element and the first heater holder;
a mounting bracket coupled to the first heater holder; and
a second heater holder coupled to the mounting bracket, wherein the third and fourth heating elements are coupled to the second heater holder in positions adjacent to the first and second heating elements, respectively, with a gap there between; and
a carrier rotary assembly coupled to mounting plate of the mounting assembly, the carrier rotary assembly to rotate the heater assembly about a rotational axis of the carrier rotary assembly.
2. The system of claim 1 , wherein each of the first and second heating elements comprise a pyrolytic boron nitride heating element.
3. The system of claim 1 , wherein each of the first, second, third and fourth heating elements comprise a pyrolytic boron nitride heating element.
4. The system of claim 3 , further comprising:
a third shield disposed between the third heating element and the second heater holder; and
a fourth shield disposed between the fourth heating element and the second heater holder.
5. The system of claim 1 , further comprising a disk transport system to transport a disk carrier into the corner chamber in a first direction, the disk transport system to transport the disk carrier out of the corner chamber in a second direction.
6. The system of claim 5 , wherein the second direction is perpendicular to the first direction.
7. The system of claim 1 , further comprising:
a load chamber,
a plurality of processing chambers; and
a disk transport system coupled to the load chamber, the corner chamber, and the plurality of process chambers to transport a disk there among.
8. The system of claim 1 , wherein the disk transport system is configured to transport disks, in sequence, from the load chamber to the corner chamber and then to the plurality of process chambers.
9. The system of claim 4 , further comprising first, second, third and fourth power connectors respectively coupled to the first, second, third and fourth heating elements through respective first, second, third and fourth heater shields.
10. A method, comprising:
transporting a disk carrier securing one or more disks into a corner chamber; and
heating, in the corner chamber, the one or more disks using a heater assembly, wherein the corner chamber comprises:
a mounting assembly, comprising:
a mounting plate;
a mounting post coupled to the mounting plate; and
a first heater holder coupled to the mounting post, wherein the first and second heater elements are coupled to the first heater holder;
the heater assembly coupled to the mounting assembly, wherein the heater assembly comprise a first heating element, a second heating element, a third heating element and a fourth heating element;
a first shield disposed between the first heating element and the first heater holder;
a second shield disposed between the second heating element and the first heater holder;
a mounting bracket coupled to the first heater holder; and
a second heater holder coupled to the mounting bracket, wherein the third and fourth heating elements are coupled to the second heater holder in positions adjacent to the first and second heating elements, respectively, with a gap there between; and
a carrier rotary assembly coupled to mounting plate of the mounting assembly, the carrier rotary assembly to rotate the heater assembly about a rotational axis of the carrier rotary assembly.
11. The method of claim 10 , further comprising rotating, in the corner chamber, the one or more disks and the heater assembly about a same rotational axis and wherein heating comprises heating the one or more disks while rotating.
12. The method of claim 10 , wherein each of the heating elements comprise a pyrolytic boron nitride heating element.
13. The method of claim 11 , wherein the one or more disks and the heater assembly are rotated about a rotational axis of the carrier rotary assembly.