Load chamber with dual heaters
View Patent ↗A disk processing system with a load chamber having a stationary heater and a movable heater.
1. A disk processing system, comprising:
a load chamber comprising:
a first heater non-movably mounted in the load chamber in a stationary position;
a second heater; and
a movement assembly coupled to the second heater to move the second heater.
2. The system of claim 1 , wherein the movement assembly comprises a rotary assembly coupled with the second heater to move the second heater about a rotational axis.
3. The system of claim 1 , wherein the movement assembly comprises a linear assembly coupled with the second heater to linearly translate the second heater.
4. The system of claim 1 , wherein the load chamber further comprises a load arm assembly comprising:
a load arm;
a wrist block coupled to the load arm; and
plurality of disk contact points coupled to the wrist block.
5. The system of claim 2 , further comprising:
a load chamber cover; and
a motor assembly operatively coupled to the rotary assembly using a timing belt and pulley assembly, wherein the motor and the rotary assemblies are mounted to the load chamber cover.
6. The system of claim 5 , wherein the motor assembly comprises a stepper motor.
7. The system of claim 2 , wherein the rotary assembly further comprises:
a rotary shaft coupled to a timing belt and pulley assembly;
a mounting flange coupled to the rotary shaft; and
a mounting plate coupled to the mounting flange.
8. The system of claim 7 , wherein the second heater is coupled to the mounting plate using one or more holders, and wherein the mounting plate and the one or more holders are constructed from a material either comprising molybdenum or tantalum.
9. The system of claim 7 , further comprising:
a power assembly;
one or more power connectors coupled to the second heater and the mounting plate; and
one or more power lines disposed within the power feed through cavity in the rotary shaft coupling the power assembly to the one or more power connectors on the mounting plate.
10. The system of claim 1 , wherein the second heater comprises a pyrolytic boron nitride heating element.
11. The system of claim 1 , wherein positions of the first and second heaters within the load chamber are configured to heat one or more disks.
12. The disk processing system of claim 1 , wherein the first heater is non-movably mounted in the load chamber in a manner permitting removal and replacement due to damage or defect.
13. A method of operating a load chamber, comprising:
moving, in the load chamber, a load arm assembly securing one or more disks to a position adjacent to a first heater on a first side of the one or more disks, wherein the first heater is non-movably mounted in the load chamber in a stationary position;
moving, in the load chamber, a second heater adjacent to the one or more disks on a second side of the one or more disks opposite that of the first heater; and
heating, in the load chamber, the one or more disks with the first and second heaters.
14. The method of claim 13 , wherein moving the second heater comprises rotating a mounting plate, to which the second heater is coupled, about a rotational axis.
15. The method of claim 14 , wherein the mounting plate is coupled to a rotary shaft, and wherein the second heater is rotated by rotation of the rotary shaft using a timing belt and pulley assembly.
16. The method of claim 15 , further comprising powering the second heater using power lines disposed in a power feed through cavity of the rotary shaft and coupled to power connectors disposed on the second heater.
17. The method of claim 13 , wherein the one or more disks comprise two, single sided disks.
18. The method of claim 17 , further comprising:
loading the two, single sided disks into the load chamber prior to moving the load arm assembly; and
moving the second heater away from the two, single sided disks after heating; and
unloading the two, single sided disks out of the load chamber.
19. The method of claim 13 , wherein the first heater is non-movably mounted in the load chamber in a manner permitting removal and replacement due to damage or defect.
20. A disk processing system, comprising:
means for moving, in a load chamber, a load arm assembly securing one or more disks to a position adjacent to a first heater on a first side of the one or more disks, wherein the first heater is non-movably mounted in the load chamber in a stationary position;
means for moving a second heater adjacent to the one or more disk on a second side of the one or more disks opposite that of the first heater; and
means for heating the one or more disks with the first and second heaters.
21. The disk processing system of claim 20 , wherein the first heater is non-movably mounted in the load chamber in a manner permitting removal and replacement due to damage or defect.