Pressure sensor and manufacturing method
A semiconductor substrate, provided with a differential pressure diaphragm, and a glass pedestal, which is provided on the bottom side of the semiconductor substrate, are provided, wherein: the bottom surface of the semiconductor substrate and the top surface of the glass pedestal are bonded together; a pressure introducing hole is formed in the glass pedestal so as to pass through the glass pedestal, connecting between the top and bottom surfaces of the glass pedestal; the pressure introducing hole is formed with a first diameter for the pressure introducing hole at the bottom surface of the glass pedestal from the bottom surface of the glass pedestal to a first position; and a second diameter for the pressure introducing hole at the top surface of the glass pedestal is larger than the first diameter; where a metal thin film layer is deposited on the bottom surface of the glass pedestal.
1. A pressure sensor comprising:
a semiconductor substrate comprising a diaphragm portion; and
a glass pedestal provided on a bottom side of the semiconductor substrate;
wherein the bottom surface of the semiconductor substrate is bonded to a top surface of the glass pedestal;
a pressure introducing hole is formed in the glass pedestal so as to pass through the glass pedestal between the top surface and a bottom surface of the glass pedestal;
wherein the pressure introducing hole is formed with a first diameter for the pressure introducing hole at the bottom surface of the glass pedestal from the bottom surface of the glass pedestal to a first position, and a second diameter for the pressure introducing hole at the top surface of the glass pedestal is larger than the first diameter;
a metal thin film layer formed on the bottom surface of the glass pedestal; and
a metal base having a top surface thereof bonded by solder to the bottom surface of the glass pedestal with the metal thin film layer interposed therebetween,
wherein a through hole portion formed in the metal base so as to pass through the metal base between the top surface and a bottom surface of the metal base and so as to connect to the pressure introducing hole of the glass pedestal;
wherein a diameter of the through hole portion is larger than the first diameter of the pressure introducing hole; and
wherein a solder fillet is formed at a step part between the through hole in the metal thin film layer and the through hole portion of the metal base.
2. A pressure sensor as set forth in claim 1 , wherein:
the metal thin film layer is formed across at least a portion of a side wall, which is the side wall of the pressure introducing hole from the bottom surface of the glass pedestal, in a range from the bottom surface of the glass pedestal to the first position.
3. A pressure sensor as set forth in claim 1 , wherein:
the pressure introducing hole is formed with the second diameter from the top surface of the glass pedestal to a second position.
4. A method for manufacturing a pressure sensor that comprises a semiconductor substrate having a diaphragm portion and a glass pedestal that is provided at the bottom side of the semiconductor substrate, comprising the steps of:
forming a pressure introducing hole in the glass pedestal so as to pass through the glass pedestal between a top surface and a bottom surface of the glass pedestal;
depositing a metal thin film layer on the bottom surface of the glass pedestal wherein the pressure introducing hole has been formed;
bonding the bottom surface of the semiconductor substrate together with the top surface of the glass pedestal;
wherein the pressure introducing hole forming process, the pressure introducing hole is formed from the bottom surface of the glass pedestal to a first position with a first diameter for the pressure introducing hole at the bottom surface of the glass pedestal, and a second diameter for the pressure introducing hole at the top surface of the glass pedestal is larger than the first diameter;
bonding the bottom surface of the glass pedestal together with the top surface of a metal base, using solder, with a metal thin film layer interposed therebetween;
wherein forming a through hole portion in the metal base so as to pass through the metal base between the top and bottom surfaces of the metal base and so as to connect to the pressure introducing hole of the glass pedestal;
wherein the diameter of the through hole portion is larger than the first diameter of the pressure introducing hole; and
wherein in the metal base on the process, a solder fillet is formed at a step part between the through hole in the metal thin film layer and the through hole portion of the metal base.
5. A pressure sensor manufacturing method as set forth in claim 4 , wherein:
in the metal thin film layer depositing process, the metal thin film layer is deposited across at least a portion of a side wall, which is the side wall of the pressure introducing hole from the bottom surface of the glass pedestal, in a range from the bottom surface of the glass pedestal to the first position.
6. A pressure sensor manufacturing method as set forth in claim 4 , wherein:
in the pressure introducing hole forming the process, the pressure introducing hole is formed with the second diameter from the top surface of the glass pedestal to the a second position.