Edge-emitting semiconductor laser with photonic-bandgap structure formed by intermixing
View Patent ↗A separate-confinement heterostructure, edge-emitting semiconductor laser having a wide emitter width has elongated spaced apart intermixed and disordered zones extending through and alongside the emitter parallel to the emission direction of the emitter. The intermixed zones inhibit lasing of high order modes. This limits the slow axis divergence of a beam emitted by the laser.
1. A method of fabricating an edge emitting semiconductor laser comprising the steps of:
epitaxially growing a composite layer structure on a substrate, said layer structure including an active layer bounded by a pair of waveguide layers which in turn are bounded by a pair of cladding layers;
depositing a cap layer over one of the cladding layers;
etching a plurality of slots in the cap layer;
depositing a material layer over the cap layer; and
heating the structure to cause the material layer to diffuse into the closest underlying waveguide layer to define a plurality of zones within the waveguide layer, said material being selected so that the index of refraction in the zones is less than the index of refraction of the waveguide layer, said zones for reducing the creation of higher order lasing modes during the operation of the laser.
2. A method as recited in claim 1 , wherein said material layer is defined by a pair of layers formed from arsenic doped silicon and arsenic doped nitrogen.
3. A method as recited in claim 1 , wherein the spacing between the zones near the center of the structure is greater than the spacing of the zones near the side edges of the structure.
4. A method as recited in claim 1 , where during the heating step, the material is caused to diffuse through the closest underlying waveguide layer and diffuse into the active layer.