Light emitting device having protrusion and recess structure and method of manufacturing the same
View Patent ↗The semiconductor light emitting device having a protrusion and recess structure includes: a lower clad layer disposed on a substrate; an active layer formed on one portion of a top surface of the lower clad layer; an upper clad layer formed on the active layer; a first electrode formed on the upper clad layer; and a second electrode that is formed on a protrusion and recess structural pattern region formed on a portion of the top surface of the lower clad layer not occupied by the active layer.
1. A semiconductor light emitting device having a protrusion and recess structure, the device comprising:
a lower clad layer disposed on a substrate;
an active layer formed on one portion of a top surface of the lower clad layer;
an upper clad layer formed on the active layer;
a first electrode formed on the upper clad layer; and
a second electrode that is formed on a protrusion and recess structural pattern region having a plurality of recesses and a plurality of protrusions so as to fill the recesses, the protrusion and recess structural pattern region being formed on a portion of the top surface of the lower clad layer not occupied by the active layer,
wherein the second electrode surrounds the portion of the top surface of the lower clad layer occupied by the active layer,
wherein the vertical section of each of the recesses has a trapezoidal shape and the upper surface of each of the protrusions is substantially planar.
2. The semiconductor light emitting device of claim 1 , wherein the substrate is a sapphire substrate.
3. The semiconductor light emitting device of claim 1 , wherein the lower clad layer and the upper clad layer are formed of gallium nitride-based materials.
4. The semiconductor light emitting device of claim 1 , wherein the first electrode includes at least one material selected from the group consisting of Ag, Al, Rh, Pd, Ni, and Pt.
5. The semiconductor light emitting device of claim 1 , wherein the second electrode includes at least one material selected from the group consisting of Al, Cr, Ti, and Au.
6. The semiconductor light emitting device of claim 1 , wherein the thickness of the lower clad layer is 1 to 10 μm.
7. The semiconductor light emitting device of claim 1 , wherein the width of the protrusion and recess structure is 0.1 to 10 μm and the height of the protrusion and recess structure is 0.1 to 10 μm.