Semiconductor device assembly
View Patent ↗A fiber coupled semiconductor device having an improved optical stability with respect to temperature variation is disclosed. The stability improvement is achieved by placing the platform holding the semiconductor chip and the optical fiber onto a spacer mounted on a base. The spacer has an area smaller than the area of the platform, for mechanical decoupling of thermally induced deformation of the base from a deformation of the platform of the semiconductor device. Attaching the optical fiber to a vertical mounting surface of a fiber mount, and additionally attaching the fiber mount to a submount of the semiconductor chip further improves thermal stability of the packaged device.
1. A semiconductor device assembly comprising:
a thermoelectric cooler;
a heat conducting spacer mounted on the thermoelectric cooler;
a semiconductor device subassembly including:
a platform having a bottom surface with a platform mounting area mounted on the spacer; and
a semiconductor chip extending in a first plane, the semiconductor chip thermally coupled to the platform for removing heat from the semiconductor chip;
a fiber mount attached to the semiconductor device subassembly, the fiber mount having a fiber mounting surface; and
an optical fiber attached to the fiber mounting surface and optically coupled to the semiconductor chip for receiving light therefrom;
wherein the platform mounting area is smaller than a total area of the bottom surface of the platform, whereby sensitivity of the optical coupling between the semiconductor chip and the optical fiber to deformation of the thermoelectric cooler is lessened.
2. The semiconductor device assembly of claim 1 ,
wherein the first plane is perpendicular to the fiber mounting surface, whereby a dependence of the optical coupling between the semiconductor chip and the optical fiber on temperature of the assembly is lessened,
wherein the optical fiber is a lensed optical fiber having an anamorphic fiber lens having mutually orthogonal first and second optical planes parallel to the first plane and the fiber mounting surface, respectively.
3. The semiconductor device assembly of claim 1 , wherein the semiconductor device subassembly further includes a submount including a bottom surface with a submount mounting area mounted on the platform, for supporting the semiconductor chip and for thermally coupling the semiconductor chip to the platform.
4. The semiconductor device assembly of claim 3 , wherein the fiber mount is attached to the submount, whereby sensitivity of the optical coupling between the semiconductor chip and the optical fiber to deformation of the thermoelectric cooler is lessened.
5. The semiconductor device assembly of claim 4 , wherein the first plane is perpendicular to the fiber mounting surface, whereby a dependence of the optical coupling between the semiconductor chip and the optical fiber on temperature of the assembly is lessened.
6. The semiconductor device assembly of claim 5 , wherein the optical fiber is a lensed optical fiber having an anamorphic fiber lens having mutually orthogonal first and second optical planes parallel to the first plane and the fiber mounting surface, respectively.
7. The semiconductor device assembly of claim 3 , wherein the submount mounting area and the platform mounting area each have a length in a direction of a length of the optical fiber, wherein the length of the submount mounting area is between 30% and 80% of the length of the platform mounting area.
8. The semiconductor device assembly of claim 7 , wherein the submount mounting area is disposed over the platform mounting area.
9. A packaged diode laser assembly including:
the semiconductor device assembly of claim 1 , wherein the semiconductor chip is a laser chip, and wherein the semiconductor device subassembly is a semiconductor laser subassembly, and
a frame for enclosing the semiconductor laser subassembly and the fiber mount, wherein the thermoelectric cooler is attached to inside of the frame.
10. The packaged diode laser assembly of claim 9 , wherein the frame is a hermetic package having a feedthrough for the optical fiber.
11. The semiconductor device assembly of claim 1 , wherein the semiconductor chip is a laser chip, and wherein the semiconductor device subassembly is a semiconductor laser subassembly.
12. The semiconductor device assembly of claim 1 , wherein a material of the spacer includes aluminum nitride or copper.
13. The semiconductor device assembly of claim 1 , wherein a material of the base includes steel.
14. A method of assembly of a semiconductor device, including:
(a) providing a thermoelectric cooler;
(b) mounting a heat conducting spacer on the thermoelectric cooler;
(c) providing a semiconductor device subassembly including: a platform having a bottom surface with a platform mounting area; a semiconductor chip extending in a first plane, the semiconductor chip thermally coupled to the platform for removing heat from the semiconductor chip; a fiber mount attached to the semiconductor device subassembly, the fiber mount having a fiber mounting surface; and an optical fiber attached to the fiber mounting surface and optically coupled to the semiconductor chip for receiving light therefrom; and
(d) mounting the platform mounting area on the spacer so that the platform mounting area is smaller than a total area of the bottom surface of the platform, whereby sensitivity of the optical coupling between the semiconductor chip and the optical fiber to deformation of the thermoelectric cooler is lessened.
15. The method of claim 14 , wherein the semiconductor device subassembly further includes a submount including a bottom surface with a submount mounting area,
wherein step (c) includes:
(c3) mounting the submount mounting area on the platform, for supporting the semiconductor chip and for thermally coupling the semiconductor chip to the platform.
16. The method of claim 15 , wherein step (c) further includes
(c4) attaching the fiber mount to the submount, for lessening sensitivity of the optical coupling between the semiconductor chip and the optical fiber to deformation of the thermoelectric cooler.
17. The semiconductor device of claim 1 , wherein the spacer has a thermal conductivity of between 200W/m*K and 400W/m*K.