Piezoelectric vibrator, manufacturing method of piezoelectric vibrator, oscillator, electronic device, and radio-controlled timepiece
A piezoelectric vibrator which can be manufactured efficiently and a manufacturing method thereof are provided. The piezoelectric vibrator includes: a tuning-fork-type piezoelectric vibrating piece which has a pair of vibration arm portions, excitation electrodes formed on base end portions of the vibration arm portions, and weight metal films formed on distal end portions of the vibration arm portions; and a package which houses the piezoelectric vibrating piece therein. A gettering film on which a laser radiation flaw is formed is formed on intermediate portions between the base end portions and the distal end portions of the vibration arm portions. A first metal film included in the excitation electrode, a second metal film included in the weight metal film and the gettering film are formed using the same material.
1. A piezoelectric vibrator comprising:
a hermetically closed casing comprising first and second substrates with a cavity therebetween, which are anodically bonded together;
a piezoelectric vibrating strip having a proximal end and distal end and secured inside the cavity;
a first layer applied at a substantially uniform thickness to cover the piezoelectric vibrating strip, the first layer being made of a material having a gettering characteristic, wherein the first layer constitutes an adjustable weight in a first section of the piezoelectric vibrating strip located close to the distal end, driving electrodes in a second section thereof located between the first section and the proximal end and mount electrodes in a third section thereof located close to the proximal end between the second section and the proximal end;
a second layer applied on the first layer at a substantially uniform thickness in the first and third sections so as to expose the first layer in part in the first section and at least in part in the second section, wherein the second layer constitutes an adjustable weight in the first section and mount electrodes in the third section; and
an insulation layer applied to at least partially cover the second section so as to expose the second layer at least in part in the third section and expose both the first and second layers at least in part in the first section such that the first layer is directly irradiatable in the first section with a laser from the outside of the casing.
2. The piezoelectric vibrator according to claim 1 , wherein the piezoelectric vibrating strip comprises a pair of vibrating arms.
3. The piezoelectric vibrator according to claim 1 , wherein the first layer is made of a material selected from the group consisting of chromium, titanium, vanadium and zirconium.
4. An oscillator comprising the piezoelectric vibrator according to claim 1 , which is connected to an integrated circuit of the oscillator.
5. An electronic device comprising:
a clock; and
the piezoelectric vibrator according to claim 1 electrically connected to the clock.
6. A radio-controlled clock comprising:
a filter; and
the piezoelectric vibrator according to claim 1 electrically connected to the filter.
7. The piezoelectric vibrator according to claim 1 , further comprising a third layer applied in the first section to cover at least part of the second layer, wherein the third layer constitutes an adjustable weight in the first section.