Granted Patent B2

US 8,314,472 · App. 12/846,060 · Granted Nov 20, 2012

Abstract

Claims (29)

1. A semiconductor structure, comprising:

a substrate;

a metal layer disposed over the substrate, the metal layer comprising a first electrical trace, a second electrical trace, and a third electrical trace;

a conductive pillar disposed directly on and in electrical contact with the first electrical trace and the third electrical trace; and

a dielectric layer selectively disposed between the metal layer and the conductive pillar, wherein the dielectric layer electrically isolates the second electrical trace from the conductive pillar.

2. A semiconductor structure as claimed in claim 1 , wherein the first electrical trace is an electrical signal trace.

3. A semiconductor structure as claimed in claim 1 , wherein the first electrical trace is an electrical ground trace.

4. A semiconductor structure as claimed in claim 1 , wherein the second electrical trace is an electrical signal trace.

5. A semiconductor structure as claimed in claim 1 , wherein the second electrical trace is an electrical ground trace.

6. A semiconductor structure as claimed in claim 1 , wherein the conductive pillar comprises one of copper, silver and tin.

7. A semiconductor structure as claimed in claim 1 , wherein the dielectric layer comprises silicon nitride.

8. A semiconductor structure as claimed in claim 1 , wherein the substrate comprises a Group III-V semiconductor material.

9. A semiconductor structure as claimed in claim 1 , wherein the substrate comprises silicon.

10. A semiconductor structure as claimed in claim 1 , wherein the substrate comprises silicon-germanium (SiGe).

11. A semiconductor structure as claimed in claim 1 , further comprising another metal layer disposed beneath the metal layer.

12. A semiconductor structure as claimed in claim 11 , wherein the other metal layer comprises a signal trace.

13. A semiconductor structure, comprising:

a substrate;

a first metal layer disposed over a semiconductor device, the first metal layer comprising a first electrical signal trace;

a second metal layer disposed over the first metal layer, the second metal layer comprising a second electrical signal trace, a first electrical ground trace, and a second electrical ground trace;

a conductive pillar disposed directly on and in electrical contact with the first electrical ground trace and the second electrical ground trace; and

a dielectric layer selectively disposed between the first metal layer, the second metal layer and the conductive pillar, wherein the dielectric layer electrically isolates the second electrical signal trace from the conductive pillar.

14. A semiconductor structure as claimed in claim 13 , wherein the conductive pillar comprises one of copper and silver and tin.

15. A semiconductor structure as claimed in claim 13 , wherein the dielectric layer comprises silicon nitride.

16. A semiconductor structure as claimed in claim 13 , further comprising a passive electrical component disposed over the substrate.

17. A semiconductor structure as claimed in claim 13 , further comprising an active semiconductor device disposed over the substrate.

18. A semiconductor structure as claimed in claim 17 , wherein the substrate comprises a Group III-V semiconductor material and the active semiconductor device comprises a heterojunction bipolar transistor (HBT).

19. A semiconductor structure as claimed in claim 17 , wherein the substrate comprises a Group III-V semiconductor material and the active semiconductor device comprises a high electron mobility transistor (HEMT).

20. A semiconductor structure as claimed in claim 17 , wherein the substrate comprises silicon and the active semiconductor device comprises a metal oxide semiconductor (MOS) device.

Assignments (8)