Anti-reflective coatings for micro-fluid applications
View Patent ↗Micro-fluid ejection heads have anti-reflective coatings. The coatings destructively interfere with light at wavelengths of interest during subsequent photo imaging processing, such as during nozzle plate imaging. Methods include determining wavelengths of photoresists. Layers are applied to the substrate and anodized. They form an oxidized layer of a predetermined thickness and reflectivity that essentially eliminates stray and scattered light during production of nozzle plates. Process conditions include voltages, biasing, lengths of time, and bathing solutions, to name a few. Tantalum and titanium oxides define further embodiments as do layer thicknesses and light wavelengths.
1. A method of making a micro-fluid ejection head on a substrate undergoing subsequent photo imaging, comprising:
determining a wavelength of interest of a photoresist layer used in the subsequent photo imaging; and
forming a layer on the substrate at a predetermined thickness and at a predetermined index of refraction at said wavelength of interest to destructively interfere with light at said determined wavelength during the subsequent photo imaging, wherein the forming the layer further includes anodizing the substrate to achieve an oxide layer.
2. The method of claim 1 , wherein the forming the layer further includes applying a tantalum layer wherein the anodizing further includes anodizing the applied layer into tantalum oxide.
3. The method of claim 1 , wherein the forming the layer further includes applying a titanium layer wherein the anodizing further includes anodizing the applied layer into titanium oxide.
4. The method of claim 1 , wherein the anodizing further includes bathing the substrate in a solution of acetic acid.
5. The method of claim 1 , wherein the anodizing further includes applying a voltage between the substrate and an anodizing solution.
6. The method of claim 5 , further including applying the voltage at a discrete voltage level selected in the range from about 10 to about 20 volts dc for a time selected in a range from about 1 to about 4 minutes.
7. The method of claim 1 , further including forming the oxide into the predetermined thickness selected in a range from about 275 to about 420 angstroms.
8. A method of making a micro-fluid ejection head on a substrate undergoing subsequent photo imaging, comprising:
determining a wavelength of interest of a photoresist layer used in the subsequent photo imaging;
applying a layer on the substrate before the photo imaging;
anodizing the layer into an oxide before the photo imaging, the oxide having reflectivity of light at said determined wavelength of interest that destructively interferes with the light during the subsequent photo imaging.
9. A method of making a micro-fluid ejection head on a substrate eventually undergoing photo imaging, comprising:
determining a wavelength of interest of a photoresist layer used in the subsequent photo imaging;
applying a layer of tantalum on the substrate before the photo imaging;
anodizing the tantalum into a thickness of tantalum oxide before the photo imaging, the tantalum oxide destructively interfering with light at said determined wavelength of interest during the subsequent photo imaging.
10. The method of claim 9 , wherein the anodizing further includes bathing the substrate in a solution of acetic acid.
11. The method of claim 10 , further including applying a voltage potential between the substrate and the solution.
12. The method of claim 11 , further including forming the tantalum oxide into the thickness selected in a range from about 275 to about 420 angstroms.
13. The method of claim 11 , further including applying the voltage potential at a discrete voltage level selected in the range from about 10 to about 20 volts dc.
14. The method of claim 9 , further including selecting the photoresist layer at an I-line wavelength.
15. The method of claim 14 , wherein the anodizing further includes anodizing an exposed outer surface of said applied layer of tantalum into the thickness of said tantalum oxide at about 330 angstroms wherein the applied layer of tantalum is relatively thicker than the outer surface of said tantalum oxide.
16. The method of claim 9 , further including undertaking the photo imaging of the substrate while the tantalum oxide destructively interferes with light at the wavelength of interest.
17. The method of claim 11 , further including applying the voltage potential for a time selected in a range from about 1 to about 4 minutes.
18. The method of claim 9 , further including transforming the applied layer of tantalum into said tantalum oxide with a reflectivity of less than about 0.1 at said wavelength of interest.