IP Library Granted Patent US 8,196,732
Granted Patent B2
US 8,196,732 · App. 12/848,442 · Granted Jun 12, 2012

Buffered storage and transport device for tool utilization

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Quick Facts
Patent No.
US 8,196,732
App. No.
12/848,442
Granted
Jun 12, 2012
Kind
B2
Abstract

A transport mechanism is configured to transport a work piece carrier within a buffer in fabrication facility, comprising: a transporter configured to travel on two rails, wherein the transporter comprises (i) a flat belt hoist mechanism configured to lift and to lower one or more work piece carriers, and (ii) a gripper mechanism configured to capture and to release the one or more work piece carriers.

Claims (30)

1. A transport mechanism configured to transport a work piece carrier within a buffer in a fabrication facility, comprising:

a transporter configured to travel on two rails, wherein the transporter comprises (i) a hoist mechanism configured to lift and to lower the work piece carrier, and (ii) a gripper mechanism configured to capture and to release the work piece carrier;

a work piece container configured to store one or more work pieces;

an enclosed frame comprising:

one or more storage shelves configured to hold the work piece container and configured for work piece container exchange with an overhead transport vehicle;

one or more frame rails mounted (i) above at least one of the one or more storage shelves, and (ii) at a base above a load port on which the transporter is configured to travel; and

an elevator configured to move the transporter between a first level and a second level of the buffer;

a carriage with one or more carriage rails configured to support the transporter;

an alignment device configured to align the one or more carriage rails with at least one of the one or more frame rails;

a frame support configured to elevate the enclosed frame above one or more load ports of a process tool in the fabrication facility; and

a control mechanism configured to:

direct the transporter to move between one of the one or more storage shelves and a load port location;

direct the elevator to move between the first level and the second level of the buffer;

synchronize movement of two or more of the elevator, the transporter, and the work piece container; and

exchange commands with a work piece container movement system that is configured to manage movement of the work piece container within the fabrication facility.

2. The transport mechanism of claim 1 , wherein the control mechanism is further configured to instruct:

the transporter to travel to a starting location in the fabrication facility;

the hoist mechanism to lower the gripper mechanism to the work piece carrier;

the gripper mechanism to capture the work piece carrier;

the hoist mechanism to raise the gripper mechanism with a captured work piece carrier to a docked position in the fabrication facility;

the transporter to travel to a destination location in the fabrication facility;

the hoist mechanism to lower the gripper mechanism with the captured work piece carrier to the destination location;

the gripper mechanism to release the captured work piece carrier; and

the hoisting mechanism to retract the gripper mechanism.

3. The transport mechanism of claim 1 , wherein the fabrication facility comprises a semiconductor fabrication facility.

4. The transport mechanism of claim 1 , wherein the fabrication facility comprises a flat panel fabrication facility.

5. The transport mechanism of claim 1 , wherein the transporter is configured to operate on internal power.

6. The transport mechanism of claim 1 , wherein the gripper mechanism is configured to operate on internal power.

7. The transport mechanism of claim 6 , wherein the internal power comprises battery storage power.

8. The transport mechanism of claim 1 , wherein the transporter is configured to receive external power from a resistively coupled electrical connection.

Assignments (2)
MERGER Recorded Apr 24, 2013
From: MURATEC AUTOMATION CO., LTD.
To: MURATA MACHINERY LTD.
Reel/Frame 030408/0548 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Oct 27, 2010
From: FATULA, JOSEPH JOHN; DEYANOV, ROUMEN ILIEV; TZOU, KEVIN; GONZALEZ, PABLO; CARLSON, ROBERT; GREENE, JOHN BROOKS
To: MURATA MACHINERY LTD.
Reel/Frame 025200/0237 →