Electro-luminescence device including a thin film transistor and method of fabricating an electro-luminescence device
View Patent ↗An electro-luminescence device including an electro-luminescence element and a thin film transistor electrically connected to the electro-luminescence element. The thin film transistor includes a gate electrode formed over a substrate, an insulating layer formed over the gate electrode, and a first semiconductor pattern formed over the insulating layer. An etch stop layer is formed over the first semiconductor layer. A second semiconductor pattern is formed over the etch stop layer at one side of the etch stop layer, and a third semiconductor pattern is formed over the etch stop layer at another side of the etch stop layer. A source electrode is formed over the second semiconductor pattern, and a drain electrode is formed over the third semiconductor pattern.
1. An electro-luminescence device comprising:
a gate line extending in a first direction on a substrate;
a data line extending in a second direction on the substrate;
a power supply line extending parallel with the data line on the substrate;
a switching transistor electrically connected to the gate line and the date line;
a driving transistor electrically connected to the switching transistor and the power supply line, the driving transistor comprising:
a first gate electrode electrically connected to the switching transistor;
a first semiconductor pattern disposed on the first gate electrode;
an etch stop layer disposed on the first semiconductor pattern;
a first source electrode disposed on the first semiconductor pattern, the first electrode extending from the power supply line; and
a first drain electrode disposed on the first semiconductor pattern; and
an electro-luminescence element electrically connected to the first drain electrode of the driving transistor.
2. The electro-luminescence device of claim 1 , wherein the switching transistor further comprises:
a second gate electrode extending from the gate line;
a second semiconductor pattern disposed on the second gate electrode;
a second source electrode disposed on the second semiconductor pattern, the second source electrode extending from the date line; and
a second drain electrode disposed on the second semiconductor pattern,
wherein the first and second gate electrodes are disposed from substantially the same layer, the first and second source electrodes are disposed from substantially the same layer.
3. The electro-luminescence device of claim 2 , wherein the etch stop layer includes silicon oxide (SiO x ) or silicon nitride (SiN x ).
4. The electro-luminescence device of claim 3 , wherein the first and second semiconductor patterns are formed from a semiconductor layer, and the semiconductor layer is substantially the same shape as the data line in a plan view.
5. The electro-luminescence device of claim 2 , wherein the first and second semiconductor patterns are formed from a semiconductor layer, and the semiconductor layer is substantially the same shape as the data line in a plan view.
6. The electro-luminescence device of claim 1 , wherein the etch stop layer includes silicon oxide (SiO x ) or silicon nitride (SiN x ).
7. The electro-luminescence device of claim 6 , wherein the first and second semiconductor patterns are formed from a semiconductor layer, and the semiconductor layer is substantially the same shape as the data line in a plan view.
8. The electro-luminescence device of claim 1 , wherein the first and second semiconductor patterns are formed from a semiconductor layer, and the semiconductor layer is substantially the same shape as the data line in a plan view.