Material measures for use in evaluating performance of measuring instrument for measuring surface texture
View Patent ↗A material measure for use in evaluating the performance of a measuring instrument for measuring surface texture includes: a measurement area having a plurality of grooves in a predetermined direction. With the configuration, each of the grooves has a simple cross-sectional shape at a cross-section along the predetermined direction; and a length of the cross-sectional shape in the predetermined direction is different for the predetermined number of adjacent grooves in the predetermined direction.
1. A material measure for use in evaluating performance of a measuring instrument for measuring surface texture, comprising
a measurement area having a plurality of grooves in a predetermined direction, wherein:
each of the grooves has a simple cross-sectional shape at a cross-section along the predetermined direction;
a length of the cross-sectional shape in the predetermined direction is different for a predetermined number of adjacent grooves in the predetermined direction,
the plurality of grooves are linear grooves formed in parallel with a direction orthogonal to the cross-section,
in the cross-section, a maximum inclination angle of a profile of the cross-sectional shape to the predetermined direction is constant between the plurality of grooves arranged in the predetermined direction, and,
when a direction orthogonal to the predetermined direction in the cross-section is a depth direction and the direction orthogonal to the cross-section is a linear direction,
in each of the grooves, a depth of the groove and the maximum inclination angle are different in the linear direction.
2. The material measure according to claim 1 , wherein
a length of the cross-sectional shape in the predetermined direction decreases for a predetermined number of adjacent grooves in the predetermined direction.
3. The material measure according to claim 1 , wherein in the cross-section, the length of the cross-sectional shape in the depth direction is different for the predetermined number of adjacent grooves in the predetermined direction.
4. The material measure according to claim 3 , wherein in the cross-section, the length of the cross-sectional shape in the depth direction decreases for the predetermined number of adjacent grooves in the predetermined direction.
5. The material measure according to claim 3 , comprising
a plurality of measurement areas, wherein
the maximum inclination angle of the profile of the cross-sectional shape with respect to the predetermined direction is different for each measurement area.
6. The material measure according to claim 5 , wherein:
when each of the measurement areas has the plurality of linear grooves formed parallel to one another,
the predetermined direction is orthogonal to a linear direction of the groove; and
the plurality of measurement areas are arranged in the linear direction.
7. The material measure according to claim 1 , wherein in each of the grooves, a depth of the groove gradually decreases in the linear direction.
8. The material measure according to claim 1 , wherein in each of the grooves, a maximum inclination angle of the groove to the predetermined direction is different in the linear direction.
9. The material measure according to claim 8 , wherein in each of the grooves, a maximum inclination angle of the groove to the predetermined direction gradually decreases in the linear direction.
10. The material measure according to claim 1 , wherein the cross-sectional shape is sine-wave-shaped.
11. The material measure according to claim 1 , wherein the cross-sectional shape is arc-shaped.
12. The material measure according to claim 1 , wherein the cross-sectional shape is polygon-shaped.
13. The material measure according to claim 1 , wherein:
the predetermined direction is parallel to a surface of the material measure; and
the cross-section is orthogonal to the surface.