Fluorinated compound, fluoropolymer and method for producing the compound

1. A polymer, obtained by polymerizing a compound of formula (1):

wherein

X is a hydrogen atom, a cyano group, or a group of formula —C(O)OZ,

Z is a hydrogen atom or a C 1-20 monovalent organic group,

n is 0, 1, or 2, and

R is independently a hydrogen atom or a C 1-20 monovalent organic group.

2. The polymer of claim 1 , which has a weight average molecular weight of from 1,000 to 1,000,000.

3. The polymer of claim 1 , further comprising, copolymerized within said polymer,

an additional reacted monomer.

4. The polymer of claim 3 , wherein the additional reacted monomer comprises at least one selected from the group consisting of an α-olefin, a fluorinated olefin, a hydrofluorodiene, a vinyl ester, a vinyl ether, a cyclic olefin, maleic anhydride, and vinyl chloride.

5. The polymer of claim 4 , wherein the additional reacted monomer comprises a fluorodiene or a (meth)acrylate.

6. The polymer of claim 5 , wherein the additional monomer comprises

wherein Z is a hydrogen atom or a C 1-20 monovalent organic group.

7. The polymer of claim 1 , comprising a unit of formula (U1)

wherein

X is a hydrogen atom, a cyano group, or a group of formula —C(O)OZ,

Z is a hydrogen atom or a C 1-20 monovalent organic group, and

n is 0, 1, or 2.

8. A blocked polymer, obtained by a process comprising:

reacting the polymer of claim 1 , wherein Z is a hydrogen atom,

with a blocking agent comprising an alcohol, an alkyl halide, or an alkoxyalkyl halide.

9. The blocked polymer of claim 8 , wherein the blocking agent comprises

at least one alcohol of a formula selected from the group consisting of

HO—C(Y 1 ) 3 ,

HO—CH 2 OY 2 , and

formula (3)

or an alkoxy halide of the alcohol,

wherein

each of Y 1 and Y 2 , independent of each other, is a hydrogen atom or a C 1-19 monovalent saturated hydrocarbon group,

Z 13 is a hydrogen atom or a C 1-16 monovalent saturated hydrocarbon group, and

Q 13 is a C 3-19 group which forms a bivalent cyclic hydrocarbon group in combination with the carbon atom in the formula,

provided that Y 1 , Y 2 , and Z 13 , in the case of the monovalent saturated hydrocarbon group, and Q 13 , between the carbon atom-carbon atom, optionally comprise a group of formula —O—, a group of formula —C(O)—, or a group of formula —C(O)O—, and

provided that, in Y 1 , Y 2 , Z 13 , and Q 13 , a fluorine atom, a hydroxyl group, or a carboxyl group is optionally bonded to a carbon atom.

10. A material, comprising the polymer of claim 1 , adapted for immersion lithography.

11. A blocked polymer, obtained by a process comprising reacting the polymer of claim 1 , wherein Z is a hydrogen atom, with a blocking agent comprising at least one group of formula —C(CF 3 ) 2 OH.

12. The polymer of claim 1 , wherein at least one Z is a C 3-20 monovalent organic group comprising at least one group of formula —C(CF 3 ) 2 OH.

13. The polymer of claim 1 , wherein X is a hydrogen atom.

14. The polymer of claim 1 , wherein X is a cyano group.

15. The polymer of claim 1 , wherein X has a formula —C(O)OZ.

16. The polymer of claim 1 , wherein Z is a hydrogen atom.

17. The polymer of claim 1 , wherein n is 0.

18. The polymer of claim 1 , wherein n is 1.

19. A polymer, obtained by polymerizing a compound of formula (2):

wherein

Z 111 is a C 3-20 monovalent organic group comprising at least one group of formula —C(CF 3 ) 2 OH,

n is 0, 1, or 2, and

R is independently a hydrogen atom or a C 1-20 monovalent organic group.

20. A material, comprising the polymer of claim 19 , adapted for immersion lithography.