Granted Patent
B2
US 8,338,954 · App. 12/858,929 · Granted Dec 25, 2012
Semiconductor apparatus and fabrication method thereof
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Abstract
A semiconductor apparatus includes an aluminum electrode film formed on a semiconductor chip; and a nickel plated layer formed on the aluminum electrode film, wherein a concentration of sodium and potassium present in the nickel plated layer and at an interface between the nickel plated layer and the aluminum electrode film is 3.20×10 14 atoms/cm 2 or less.
Claims (4)
1. A semiconductor apparatus comprising:
an aluminum electrode film formed on a semiconductor chip; and
a nickel plated layer formed on the aluminum electrode film, wherein
a concentration of sodium and potassium present in the nickel plated layer and at an interface between the nickel plated layer and the aluminum electrode film is 3.20×10 14 atoms/cm 2 or less.
Assignments (2)
MERGER AND CHANGE OF NAME
Recorded Aug 26, 2011
From: FUJI ELECTRIC SYSTEMS CO., LTD. (FES); FUJI TECHNOSURVEY CO., LTD. (MERGER BY ABSORPTION)
To: FUJI ELECTRIC CO., LTD.
Reel/Frame 026970/0872 →
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded Aug 20, 2010
From: FUJIWARA, HITOSHI; HORASAWA, TAKAYASU; KAZAMA, KENICHI
To: FUJI ELECTRIC SYSTEMS CO., LTD.; C. UYEMURA & CO., LTD.
Reel/Frame 024865/0093 →