Encapsulation method of environmentally sensitive electronic element
An encapsulation method of an environmentally sensitive electronic element is provided. A first substrate is provided, wherein at least one first alignment mark and a plurality of environmentally sensitive electronic elements are formed on the first substrate. A second substrate is provided, wherein at least one second alignment mark and a plurality of limiting cavities are formed on the second substrate. A plurality of cover lids is respectively disposed in the limiting cavities. An adhesive is formed on the cover lids. The first substrate and the second substrate are laminated together with the first alignment mark and the second alignment mark as reference, so that the environmentally sensitive electronic elements are sealed in the adhesive and located between the first substrate and the second substrate. The second substrate and the cover lids are separated from each other.
1. An encapsulation method of an environmentally sensitive electronic element, comprising:
providing a first substrate, wherein at least one first alignment mark and a plurality of environmentally sensitive electronic elements are formed on the first substrate;
providing a second substrate, wherein at least one second alignment mark and a plurality of limiting cavities are formed on the second substrate;
disposing a plurality of cover lids in the limiting cavities;
forming an adhesive on the cover lids;
laminating the first substrate and the second substrate together with the first alignment mark and the second alignment mark as reference, so that the environmentally sensitive electronic elements are sealed in the adhesive and located between the first substrate and the second substrate; and
separating the second substrate and the cover lids.
2. The encapsulation method according to claim 1 , wherein a depth of each of the limiting cavities is T 1 , a total thickness of each of the cover lids and the adhesive is T 2 , and T 2 ≧T 1 .
3. The encapsulation method according to claim 1 further comprising:
providing a carrier before providing the first substrate, wherein the carrier is suitable for carrying the first substrate; and
removing the second substrate after laminating the first substrate and the cover lids together.
4. The encapsulation method according to claim 1 further comprising:
disposing a release film in the limiting cavities before disposing the cover lids in the limiting cavities; and
separating the second substrate and the cover lids, and then separating the cover lids and the release film.
5. The encapsulation method according to claim 1 further comprising:
forming a plurality of sealants on the cover lids after respectively disposing the cover lids in the limiting cavities, wherein the cover lids and the sealants form a plurality of accommodating spaces, wherein the environmentally sensitive electronic elements are located in the accommodating spaces after bonding the first substrate and the second substrate.
6. The encapsulation method according to claim 5 , wherein the step of forming the adhesive comprises:
forming a liquid adhesive in the accommodating spaces through an adhesive dispensing process;
pre-curing the liquid adhesive before bonding the first substrate and the second substrate; and
fully curing the liquid adhesive to form the adhesive after bonding the first substrate and the second substrate.
7. The encapsulation method according to claim 5 , wherein after the first substrate and the second substrate are laminated together, the environmentally sensitive electronic elements are respectively located in the accommodating spaces, and the sealants respectively surround the environmentally sensitive electronic elements.
8. The encapsulation method according to claim 1 further comprising:
performing a singularizing process to form a plurality of environmentally sensitive electronic element packages after separating the second substrate and the cover lids.
9. The encapsulation method according to claim 8 , wherein the first substrate has a plurality of substrate units, each of the substrate units is defined by a plurality of cutting lines, the environmentally sensitive electronic elements are respectively located in the substrate units, and the step of performing the singularizing process comprises:
cutting the first substrate along the cutting lines to form the environmentally sensitive electronic element packages.
10. The encapsulation method according to claim 1 , wherein the environmentally sensitive electronic elements are formed on the first substrate by taking the first alignment mark as a reference point.
11. The encapsulation method according to claim 1 , wherein the cover lids comprise a plurality of flexible cover lids.
12. The encapsulation method according to claim 1 , wherein the first substrate comprises a flexible substrate.
13. The encapsulation method according to claim 1 , wherein the second substrate comprises a rigid substrate.