IP Library Granted Patent US 8,399,065
Granted Patent B2
US 8,399,065 · App. 12/862,265 · Granted Mar 19, 2013

In-situ deposition of battery active lithium materials by thermal spraying

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Quick Facts
Patent No.
US 8,399,065
App. No.
12/862,265
Granted
Mar 19, 2013
Kind
B2
Abstract

A method and apparatus for forming an electrochemical layer of a thin film battery is provided. A precursor mixture comprising electrochemically active precursor particles dispersed in a carrying medium is provided to a processing chamber and thermally treated using a combustible gas mixture also provided to the chamber. The precursor is converted to nanocrystals by the thermal energy, and the nanocrystals are deposited on a substrate. A second precursor may be blended with the nanocrystals as they deposit on the surface to enhance adhesion and conductivity.

Claims (27)

1. A method of forming a layer on a substrate, comprising:

providing a slurry of an electrochemical deposition material to a processing chamber;

providing a combustible gas comprising carbon to the processing chamber;

forming nanocrystals of the electrochemical deposition material;

depositing the nanocrystals on a substrate; and

flowing the nanocrystals out of the processing chamber toward the substrate in a stream, and adding a binder to the stream.

2. The method of claim 1 , wherein the electrochemical deposition material comprises lithium and at least one of nickel, manganese, and cobalt.

3. The method of claim 1 , wherein the slurry of the electrochemical deposition material comprises a carbon containing liquid.

4. The method of claim 1 , wherein forming the nanocrystals of the electrochemical deposition material comprises forming a carbon containing coating on the nanocrystals.

5. The method of claim 1 , further comprising controlling thermal energy input into the electrochemical deposition material by adjusting the amount of carbon in the combustible gas.

6. The method of claim 1 , wherein the electrochemical deposition material comprises lithium, nickel, manganese, cobalt, and oxygen, and the binder is a polymer added to the stream of nanocrystals as a water emulsion.

7. The method of claim 6 , wherein the nanocrystals are coated with a carbon containing coating and the binder is added by mixing the water emulsion into the stream of nanocrystals at a location that vaporizes the water.

8. A method of forming an electrochemical layer on a substrate, comprising:

forming a slurry comprising an electrochemical precursor, the electrochemical precursor comprising lithium;

atomizing the precursor mixture in an inert gas;

flowing the atomized precursor and a combustible gas mixture comprising carbon into a processing chamber;

reacting the combustible gas mixture to form nanocrystals of the electrochemical precursor coated with a carbon containing coating;

flowing the nanocrystals in a stream out of the processing chamber toward the substrate;

adding a polymer binder to the stream to form a deposition mixture; and

depositing the deposition mixture on the substrate.

9. The method of claim 8 , wherein the electrochemical precursor further comprises nickel, manganese, and cobalt.

10. The method of claim 8 , wherein the slurry further comprises water and a carbon-containing liquid.

11. The method of claim 10 , wherein the electrochemical precursor further comprises nickel, manganese, and cobalt.

12. The method of claim 11 , wherein adding the polymer binder comprises mixing a water emulsion of the polymer binder with the nanocrystals stream at a location that vaporizes the water.

13. The method of claim 12 , further comprising controlling thermal energy input into the electrochemical precursor by adjusting the amount of carbon in the combustible gas mixture.

14. The method of claim 10 , wherein forming the nanocrystals comprises vaporizing the water and combusting the carbon-containing liquid.

15. The method of claim 14 , further comprising controlling thermal energy input into the electrochemical precursor by adjusting a total amount of carbon added to the processing chamber in the combustible gas mixture and the slurry.

Assignments (2)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Apr 24, 2025
From: APPLIED MATERIALS, INC.
To: ELEVATED MATERIALS US LLC
Reel/Frame 071036/0188 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Sep 21, 2010
From: SHANG, QUANYUAN; YANG, LU; BROWN, KARL M.; OLGADO, DONALD J.K.; PEBENITO, VICTOR; BOLANDI, HOOMAN; ISHIKAWA, TETSUYA; BACHRACH, ROBERT Z.; CHEN, LIANG-YUH
To: APPLIED MATERIALS, INC.
Reel/Frame 025024/0348 →