HETERO-JUNCTION BIPOLAR TRANSISTOR
A hetero-junction bipolar transistor includes a sub-collector layer formed on a substrate and having conductivity, a first collector layer formed on the sub-collector layer and a second collector layer formed on the first collector layer and having the same conductive type as a conductive type of the sub-collector layer. In the first collector layer, a delta-doped layer is provided.
1 - 6 . (canceled)
7 . A hetero junction bipolar transistor comprising:
a sub-collector layer formed on a substrate and having conductivity;
a first collector layer formed on the sub-collector layer;
a second collector layer formed on the first collector layer and having the same conductive type as a conductive type of the sub-collector layer; and
a spacer layer formed between the first collector layer and the second collector layer and having the same conductive type as the conductive type of the sub-collector layer.
8 . The hetero junction bipolar transistor of claim 7 , wherein the first collector layer contains InGaP,
wherein the second collector layer contains GaAs,
wherein the spacer layer contains GaAs, and
wherein the spacer layer has a higher concentration than a concentration of the second collector layer.
9 . The hetero junction bipolar transistor of claim 8 , wherein the spacer layer has a thickness of 10 nm or less, and
wherein the spacer layer has a concentration of 1×10 18 cm −3 or more and 2×10 18 cm −3 or less.
10 . (canceled)