Method of manufacturing a display substrate
View Patent ↗A method of manufacturing a display substrate includes forming a first metallic pattern including gate and storage conductors and a gate electrode of a switching device on a base substrate, forming a gate insulation layer, forming a second metallic pattern and a channel portion including a source line, source and drain electrodes of the switching device, forming a passivation layer and a photoresist film on the second metallic pattern, patterning the photoresist film to form a first pattern portion corresponding to the gate and source conductors and the switching device, and a second pattern portion formed on the storage line, etching the passivation layer and the gate insulation layer, and forming a pixel electrode using the first pattern portion. Therefore, excessive etching of the stepped portion may be prevented, so that a short-circuit defect between a metallic pattern and a pixel electrode may be prevented
1. A method of manufacturing a display substrate, comprising:
forming a first metallic pattern including a gate line, a storage line and a gate electrode of a switching device on a base substrate;
forming a gate insulation layer on the first metallic pattern;
forming a channel layer and a data layer on the gate insulation layer;
patterning the data layer and the channel layer as to form a second metallic pattern including a data line, a source electrode, a drain electrode and a channel portion between the source and drain electrodes of the switching device;
forming a passivation layer and a photoresist film on the second metallic pattern;
patterning the photoresist film through a photolithography process to form a first pattern portion corresponding to the gate line, the data line and the switching device, and a second pattern portion formed on the storage line, a part of the second pattern portion being disposed on a stepped portion of the storage line, and the second pattern portion having at least three different heights from the base substrate on an upper portion of the storage line, a lower portion of the storage line, and a tilted portion defining the stepped portion, respectively, by exposing the second pattern portion to different amounts of light with a slit mask; and
patterning a pixel electrode by depositing a transparent conductive material and removing the photoresist pattern with a portion of a transparent conductive material formed thereon.
2. A method of manufacturing a display substrate, comprising:
forming a first metallic pattern including a gate line, a storage line and a gate electrode of a switching device on a base substrate;
forming a gate insulation layer on the first metallic pattern;
forming a channel layer and a data layer on the gate insulation layer;
patterning the data layer and the channel layer to form a second metallic pattern including a data line, a source electrode, a drain electrode and a channel portion between the source and the drain electrodes of the switching device;
forming a passivation layer and a photoresist film on the second metallic pattern;
patterning the photoresist film through a photolithography process to form a first portion on the switching device, and a second portion on the storage line, a part of the second portion corresponding to a stepped portion of the storage line having at least three storage line, and a tilted portion defining the stepped portion, respectively, by exposing the stepped portion and the remaining part to different amounts of light with a slit mask; and
patterning a pixel electrode by depositing a transparent conductive material and removing the photoresist pattern with a portion of a transparent conductive material formed thereon.