Plasma display panel having inert film and manufacturing method
View Patent ↗A protective film ( 6 ) having a high secondary-emission coefficient is formed on a dielectric layer ( 5 ) so as to lower the discharge voltage of a plasma display panel. When the protective film ( 6 ) is exposed to the air, it will transform or become cloudy, or the secondary-emission coefficient will lower. To prevent this problem, an inert film ( 60 ) is formed on the surface of the protective film ( 6 ). As the inert film ( 60 ), a film of a metal oxide such as SiO 2 and a film of a metal such as Tb are simultaneously formed. Thus, an inert film ( 60 ) excellent in barrier property against oxygen and water in the air and enabling easy sputtering from near the discharge electrode at the aging step can be obtained. With this, a plasma display panel exhibiting a low discharge voltage can be realized.
1. A plasma display panel comprising:
a front substrate on which a dielectric layer is formed to cover first discharge electrodes and second discharge electrodes and a protective film is formed to cover the dielectric layer; and
a back substrate on which a dielectric layer is formed to cover address electrodes and partition walls are formed on the dielectric layer, the front and back substrates being sealed together by a sealing material formed along a periphery,
wherein an inert film formed of a metal oxide and a metal is formed on the protective film, a portion of the inert film exposed to a plasma discharge is entirely or partially removed, and
wherein, when the amount of metal oxide is x and the amount of metal is y, y/(x+y) ranges from 0.5 mol % to 50 mol %.
2. The plasma display panel according to claim 1 , wherein the metal oxide is any of metal oxides of SiO 2 , Al 2 O 3 , TiO 2 , MgO and ZrO, and the metal is Tb, La, Ce, Eu, Yb, Y, Sc, Mg, Ca, Sr, Ba, K, or Na.
3. The plasma display panel according to claim 1 , wherein the protective film includes MgO, SrO, CaO, BaO or a mixture including them.
4. The plasma display panel according to claim 1 , wherein the inert film has a film thickness ranging from 10 nm to 500 nm.
5. A method of manufacturing a plasma display panel including a front substrate on which a dielectric layer is formed to cover first discharge electrodes and second discharge electrodes, a protective film is formed to cover the dielectric layer and an inert film is formed on the protective film, and a back substrate on which a dielectric layer is formed to cover address electrodes and partition walls are formed on the dielectric layer, the front and back substrates being sealed together by a sealing material formed along a periphery, the method comprising the steps of:
simultaneous film formation of a metal oxide and a metal by vapor deposition to form the inert film;
removal of all or a part of a portion of the inert film exposed to a plasma display in an aging step; and
wherein the vapor deposition is performed by placing a metal oxide and a metal in different hearths, and then separately heating and controlling the metal oxide and the metal.