Liquid crystal display device and manufacturing method thereof
View Patent ↗The manufacturing method of a liquid crystal display device includes a step of forming the scanning signal lines including a step in which a photosensitive material film is exposed using an exposure device having a spatial light modulating element which generates an exposure pattern by a numerical control based on drawing data prepared based on the layout data. The drawing data is prepared by correction such that a shape of a portion of the scanning signal line in the layout data which is overlapped to a source electrode has an area corresponding to the distribution of a film thickness of an insulation layer interposed between the scanning signal line and the source electrode.
1. A liquid crystal display device comprising a liquid crystal display panel in which a liquid crystal material is sealed between a TFT substrate and a counter substrate, the liquid crystal display panel being configured such that
the TFT substrate includes a plurality of scanning signal lines, a plurality of video signal lines, a plurality of TFT elements and a plurality of pixel electrodes,
the plurality of TFT elements respectively have a gate electrode thereof connected to one scanning signal line out of the plurality of scanning signal lines, and have a drain electrode thereof connected to one video signal line out of the plurality of video signal lines, and
the combination of the scanning signal line to which the gate electrode is connected and the video signal line to which the drain electrode is connected differs for every TFT element, wherein
a source electrode of the TFT element includes a portion which is overlapped to the scanning signal line and a portion which is not overlapped to the scanning signal line,
the plurality of TFT elements which are connected to said one scanning signal line set the relationship between a distance from a signal input end of the scanning signal line and an area of an overlapping region between the source electrode and the scanning signal line to the monotonous decrease relationship.
2. A liquid crystal display device according to claim 1 , wherein the plurality of TFT elements which are connected to one video signal line set the relationship between the distance from a signal input end of the video signal line and the area of the overlapping region between the source electrode and the scanning signal line to the monotonous decrease relationship.
3. A manufacturing method of a liquid crystal display device comprising the steps of:
forming a TFT substrate in which a plurality of scanning signal lines, a plurality of video signal lines, a plurality of TFT elements and a plurality of pixel electrodes are formed based on preset layout data;
forming a counter substrate;
adhering the TFT substrate and the counter substrate to each other; and
filling a liquid crystal material in a space defined between the TFT substrate and the counter substrate, wherein
a source electrode of each one of the plurality of TFT elements is connected to the pixel electrode, and includes a portion which is overlapped to the scanning signal line and a portion which is not overlapped to the scanning signal line,
the step of forming the TFT substrate comprises:
a first step in which the plurality of scanning signal lines are formed;
a second step in which a first insulation layer is formed after the first step; and
a third step in which semiconductor layers of the TFT elements, the plurality of video signal lines and the source electrodes of the TFT elements are formed on the first insulation layer,
the first step comprises the steps of:
forming a conductive film;
forming a photosensitive material film on the conductive film;
exposing and developing the photosensitive material film; and
removing undesired portions of the conductive film using the developed photosensitive material film as a mask,
the exposure of the photosensitive material film is performed using an exposure device having a spatial light modulating element which generates an exposure pattern by a numerical control based on drawing data prepared based on the layout data, and
the drawing data is prepared by correction such that a shape of a portion of the scanning signal line in the layout data which is overlapped to the source electrode has an area corresponding to the distribution of a film thickness of the first insulation layer formed in the second step.
4. The manufacturing method of a liquid crystal display device according to claim 3 , wherein a plurality of TFT substrates are collectively formed using one mother substrate in the step of forming the TFT substrate, and
the exposure of the photosensitive material film performed in the first step is performed using the drawing data which differs for every position of the TFT substrate on the mother substrate.