Organic thin film transistor substrate and fabrication method therefor
View Patent ↗An organic thin film transistor substrate includes a gate line formed on a substrate, a data line intersecting the gate line and defining a subpixel area, an organic thin film transistor including a gate electrode connected to the gate line, a source electrode connected to the data line, a drain electrode facing the source electrode, and an organic semiconductor layer forming a channel between the source and drain electrodes, a passivation layer parallel with the gate line, for covering the organic semiconductor layer and peripheral regions of the organic semiconductor layer, and a bank insulating layer for determining the position of the organic semiconductor layer and the passivation layer.
1. A method of fabricating a thin film transistor substrate, comprising:
forming a gate line and a gate electrode connected to the gate line on a substrate;
forming a bank insulating layer to cover a portion of the gate electrode, the bank insulating layer having a dot hole to expose a remaining portion of the gate electrode and a line hole connected to the dot hole;
forming an gate insulating layer in the dot hole to cover the remaining portion of the gate electrode within the bank insulating layer;
forming on the bank insulating layer a data line intersecting with the gate line, a source electrode connected to the data line, a drain electrode facing the source electrode, and a pixel electrode connected to the drain electrode;
forming an semiconductor layer forming a channel between the source and drain electrodes within the bank insulating layer; and
forming a passivation layer to cover the semiconductor layer within the bank insulating layer.
2. The method of claim 1 , wherein forming the bank insulating layer includes forming a first bank insulating layer for providing the dot hole and forming a second bank insulating layer determining the position of the passivation layer.
3. The method of claim 1 , further comprising surface-processing the gate electrode before forming the gate insulating layer so that the gate electrode can have hydrophilicity with the gate insulating layer.
4. The method of claim 1 , wherein the semiconductor layer is at least partially located in the dot hole.
5. The method of claim 1 , wherein the passivation layer is parallel to the gate line and is confined to the line hole.
6. The method of claim 1 , wherein the dot hole extends down deeper than the line hole.
7. The method of claim 2 , wherein forming the bank insulating layer includes:
forming an insulating material on a substrate on which the gate electrode and the gate line are formed;
forming photoresist patterns having a different thickness by a photolithography process using a half-tone mask or a slit mask on the insulating material; and
forming the first bank insulating layer having a first thickness and the second bank insulating layer having a second thickness by an etching process using the photoresist patterns.
8. The method of claim 7 , wherein forming the data line, the source electrode, the drain electrode and the pixel electrode includes:
sequentially forming a transparent conductive layer and a source/drain metal layer on the substrate;
forming photoresist patterns having a different thickness on the source/drain metal layer;
forming a source/drain metal pattern including the data line and the source and drain electrodes on the first bank insulating layer and forming the pixel electrode on the second bank insulating layer, by patterning the source/drain metal layer and the transparent conductive layer using the photoresist patterns;
exposing the source/drain metal layer of the pixel electrode by ashing the photoresist patterns; and
removing the exposed source/drain metal layer.
9. The method of claim 3 , further comprising surface-processing the gate insulating layer before forming the semiconductor layer so that the gate insulating layer can have hydrophilicity with the semiconductor layer.