Method for forming nano size turf on transparent polymer films used in solar cells, and method for enhancing transmittance of transparent polymer films of solar cells
View Patent ↗The method for forming nano size turfs on a surface of a transparent polymer film used in a solar cell is disclosed, which comprises a first step for attaching a transparent polymer film on a glass, a second step for installing the glass prepared in the first step on an upper side of the electrodes provided in the interior of a chamber and forming either a vacuum environment or an atmospheric environment, and a third step for supplying an electric power to the electrodes under the environment formed in the second step, etching the transparent polymer film attached on the surface of the glass and forming nano size turfs in circular cone shapes.
1. A method for forming nano size turfs on a surface of a transparent polymer film used in a solar cell as an antireflection transparent polymer film, consisting of:
a first step for attaching a transparent polymer film on a glass;
a second step for installing the glass prepared in the first step on an upper side of electrodes provided in a chamber which forms either a vacuum environment or an atmospheric environment; and
a third step for supplying an electric power to the electrodes under the environment formed in the second step, etching the transparent polymer film attached on the surface of the glass without any mask to form nano size turfs in circular cone shapes on the surface of the transparent polymer film, wherein said transparent polymer film of the first step is selected from the group consisting of Fluorinated Ethylene Propylene (FEP), PerFluoroAlkoxy(PFA), PolyVinyl Fluoride (PVF), PolyVinylidene Fluoride (PVDF), Polymethyl Methacrylate, Polyethylene Terephthalate (PET) and Polycarbonate (PC).
2. The method of claim 1 , wherein said chamber of the second step comprises assistant chambers, which are a fore chamber which is formed and stays with a test sample being disposed on the electrodes, and a post chamber which is formed to maintain a certain vacuum level in the main chamber before the nano size turfs are introduced into the atmospheric environment, at a front end and a rear end of a main chamber, respectively, thereby enhancing the productivity of nano size turfs.
3. The method of claim 1 , wherein said etching of the third step is activated as a reaction gas is selectively supplied.
4. The method of claim 3 , wherein said reaction gas is selected from the group consisting of oxygen, nitrogen, moisture, argon, helium, fluorocarbon, carbochlorine and a mixture of at least two components.
5. A method for enhancing a transmittance of an antireflection transparent polymer film used in a solar cell characterized in changing the refraction index of incoming light by forming circular cone-shaped nano size turfs on the surface of a transparent polymer film used in a solar cell by means of the method consisting of:
a first step for attaching a transparent polymer film on a glass;
a second step for installing the glass prepared in the first step on an upper side of electrodes provided in a chamber which forms either a vacuum environment or an atmospheric environment; and
a third step for supplying an electric power to the electrodes under the environment formed in the second step, etching the transparent polymer film attached on the surface of the glass without any mask to form nano size turfs in circular cone shapes on the surface of the transparent polymer film,
wherein said transparent polymer film of the first step is selected from the group consisting of Fluorinated Ethylene Propylene (FEP), PerFluoroAlkoxy (PFA), PolyVinyl Fluoride (PVF), PolyVinylidene Fluoride (PVDF), Polymethyl Methacrylate, Polyethylene Terephthalate (PET) and Polycarbonate (PC).
6. The method of claim 5 , wherein said antireflection transparent polymer film can transmit more than 95% of the light with a wavelength higher than 350 nm.
7. The method of claim 5 , wherein each circular cone-shaped nano size turf formed on the surface of a transparent polymer film has a diameter of 200˜300 nm, and a length of 100˜300 nm.