Semiconductor device having groove-shaped via-hole
View Patent ↗The semiconductor device has insulating films 40, 42 formed over a substrate 10 ; an interconnection 58 buried in at least a surface side of the insulating films 40, 42 ; insulating films 60, 62 formed on the insulating film 42 and including a hole-shaped via-hole 60 and a groove-shaped via-hole 66 a having a pattern bent at a right angle; and buried conductors 70, 72 a buried in the hole-shaped via-hole 60 and the groove-shaped via-hole 66 a. A groove-shaped via-hole 66 a is formed to have a width which is smaller than a width of the hole-shaped via-hole 66 . Defective filling of the buried conductor and the cracking of the inter-layer insulating film can be prevented. Steps on the conductor plug can be reduced. Accordingly, defective contact with the upper interconnection layer and the problems taking place in forming films can be prevented.
1. A semiconductor device comprising:
a first insulating film formed above a substrate;
a first interconnection formed in the first insulating film;
a second insulating film formed above the first insulating film with the first interconnection, and including a plurality of groove-shaped via-holes arranged adjacent to each other and formed in a region above the first interconnection, each of the plurality of groove-shaped holes via-holes having a pattern which is bent at a right angle; and
a first conductor material filled in the plurality of groove-shaped via-holes, wherein
at least one of the plurality of groove-shaped via-holes is bent a plurality of times at a larger angle than 90° at a bent portion of the pattern.
2. The semiconductor device according to claim 1 , wherein the first interconnection is bent at 90°.