IP Library Granted Patent US 9,032,904
Granted Patent B2
US 9,032,904 · App. 12/881,546 · Granted May 19, 2015

Die head and liquid coater

Inventor: Akihiro Horikawa (Osaka, JP)
Assignee: PANASONIC INTELLECTUAL PROPERTY MANAGEMENT CO., LTD.
B05C11/1039B05C5/0245B05C5/0254B05C5/027H01L21/6715
View Patent ↗
Loading inventors, assignments & file history…
Monitor This Case
Get email alerts when status or documents change.
Order Certified Copies
Most orders are placed with the USPTO same day — all within 24 business hours.
Order via The Patent Place →
Pre-filled with this patent's details
Quick Facts
Patent No.
US 9,032,904
App. No.
12/881,546
Granted
May 19, 2015
Kind
B2
Abstract

A die head is disclosed comprises: a feed slot which is positioned downstream of the moving direction of the substrate and continuously feed the coating solution; a gas suction slot which is positioned upstream of the moving direction of the substrate and suctions a gas so as to create vacuum in the vicinity of the upstream edge of the bead with respect to the moving direction of the substrate; and a gas ejection slot which is positioned between the feed slot and gas suction slot and ejects a gas so as to prevent inflow of the coating solution into the gas suction slot.

Claims (12)

1. A die head for forming a coating film, the die head comprising a tip portion for continuously discharging a coating solution to form the coating film on a substrate and configured to retain a bead of the coating solution in a gap formed between the substrate and the tip portion during a relative movement of the substrate with respect to the die head in a predetermined moving direction, wherein

the tip portion comprises:

a feed slot which is positioned at a downstream side of the tip portion in the moving direction of the substrate and continuously feeds the coating solution;

a gas suction slot which is positioned at an upstream side of the tip portion in the moving direction of the substrate and suctions a gas so as to create a vacuum in a vicinity of an upstream edge of the bead with respect to the moving direction of the substrate; and

a gas ejection slot which is positioned between the feed slot and the gas suction slot and ejects a gas toward the upstream edge of the bead positioned on an upstream side from an aperture of the feed slot so as to prevent an inflow of the coating solution into the gas suction slot, wherein

a direction in which the gas ejection slot ejects the gas is one of a perpendicular direction with respect to a surface of the substrate or an inclined direction with respect to the surface of the substrate toward the upstream side of the tip portion in the moving direction of the substrate, and

an aperture plane of the feed slot, an aperture plane of the gas ejection slot, an aperture plane of the gas suction slot, a plane of the tip portion between the aperture plane of the gas ejection slot and the aperture plane of the gas suction slot, and a plane of the tip portion between the aperture plane of the feed slot and an aperture plane of the gas ejection slot are arranged on a same plane.

2. The die head according to claim 1 , wherein a distance between the feed slot and the gas ejection slot is at least 0.3 mm, and a distance between the gas ejection slot and the gas suction slot is between 0.05 mm and 15 mm.

3. The die head according to claim 1 , wherein the gas ejection slot ejects the gas in the perpendicular direction with respect to the surface of the substrate.

4. The die head according to claim 1 , wherein the gas ejection slot ejects the gas in the inclined direction with respect to the surface of the substrate toward the upstream side of the tip portion in the moving direction of the substrate.

5. The die head according to claim 4 , wherein an inclination angle of the inclined direction in which the gas ejection slot ejects the gas with respect to a normal of the substrate surface is between 1° and 75°.

6. A liquid coater comprising the die head according to claim 1 .

Assignments (2)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Mar 27, 2015
From: PANASONIC CORPORATION
To: PANASONIC INTELLECTUAL PROPERTY MANAGEMENT CO., LTD.
Reel/Frame 035269/0827 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Jan 11, 2011
From: HORIKAWA, AKIHIRO
To: PANASONIC CORPORATION
Reel/Frame 025615/0244 →
Priority Claims (2)
JP 2009-222224 · Sep 28, 2009 · national
JP 2010-178902 · Aug 9, 2010 · national
Continuity (1)
Related Publication 20110073035A1 · Mar 31, 2011