System and method for using a two part cover and a box for protecting a reticle
View Patent ↗Systems and methods to protect a mask from being contaminated by airborne particles are described. The systems and methods include providing a reticle secured in a two-part cover. The two part cover includes a removable protection device used to protect the reticle from contaminants. The cover can be held inside a pod or box that can be used to transport the cover through a lithography system from an atmospheric section to a vacuum section. While in the vacuum section, the removable cover can be moved during an exposure process during which a pattern on the reticle can be formed on a wafer.
1. A substantially gas-tight box, comprising:
a mask-carrying portion configured to hold a mask, the mask-carrying portion comprising:
a base, and
a plate;
a lid; configured to protect the mask on the mask-carrying portion;
a dome at an interior side of the lid configured to substantially prevent particles within the box from reaching the mask on the mask-carrying portion;
a gas sealing device configured to prevent gas flow between the mask-carrying portion and the lid; and
a latch configured to removably secure the lid to the mask-carrying portion.
2. The box of claim 1 , further comprising:
a particle sealing device configured to substantially prevent a flow of particles between the dome and the mask-carrying portion.
3. The box of claim 2 , further comprising:
a device used to couple the dome to the lid, the device including at least a spring configured to apply a compressive force on the particle sealing device as the lid approaches the mask-carrying portion during closure of the box, wherein the particle sealing device is compressible.
4. The box of claim 1 , further comprising:
a passage configured to allow gas to flow from a volume between the dome and the mask-carrying portion to a remaining interior volume of the box, and back, via cavities formed on the dome and the mask-carrying portion.
5. The box of claim 1 , further comprising:
another spring coupled to an interior side of the dome configured to push the mask against the mask-carrying portion to immobilize the mask during transportation.
6. The box of claim 1 , wherein the box is configured to enable sequential operation of the gas sealing device and the particle sealing device.
7. The box of claim 1 , wherein:
during closing of the box, the particle sealing device is at least partially engaged before the gas sealing device starts to compress; and
during opening of the box, the gas sealing device is substantially decompressed and separated from at least one of the lid and the mask-carrying portion before the particle sealing device starts to disengage.