ORGANIC ELECTROLUMINESCENCE DEVICE AND MANUFACTURING METHOD THEREOF
According to one embodiment, an organic EL device includes an insulating substrate, a pixel electrode disposed above the insulating substrate, an organic layer disposed on the pixel electrode, a counter-electrode disposed on the organic layer, at least one of a first recess portion in which the organic layer and the counter-electrode are missing on the pixel electrode, and a second recess portion in which the counter-electrode is missing on the organic layer, and a protection film covering the counter-electrode and the at least one of the first recess portion and the second recess portion.
1 . An organic EL device comprising:
an insulating substrate;
a pixel electrode disposed above the insulating substrate;
an organic layer disposed on the pixel electrode;
a counter-electrode disposed on the organic layer;
at least one of a first recess portion in which the organic layer and the counter-electrode are missing on the pixel electrode, and a second recess portion in which the counter-electrode is missing on the organic layer; and
a protection film covering the counter-electrode and said at least one of the first recess portion and the second recess portion.
2 . The organic EL device according to claim 1 , wherein the protection film is in contact with a top surface of the pixel electrode in the first recess portion.
3 . The organic EL device according to claim 1 , wherein the protection film is in contact with a top surface of the organic layer in the second recess portion.
4 . The organic EL device according to claim 1 , wherein the protection film is formed of an inorganic compound.
5 . The organic EL device according to claim 1 , further comprising an emission part in which the pixel electrode, the organic layer and the counter-electrode are stacked, and a non-emission part including said at least one of the first recess portion and the second recess portion.
6 . The organic EL device according to claim 5 , wherein an area of the non-emission part is less than 10% when an area of the emission part is set to be 100%.
7 . An organic EL device comprising:
an insulating substrate;
an organic EL element disposed above the insulating substrate and including an emission part which emits light, and a recess part which emits no light and has an area of less than 10% when an area of the emission part is set to be 100%; and
a protection film covering the organic EL element.
8 . The organic EL device according to claim 7 , wherein the emission part includes a pixel electrode disposed above the insulating substrate, an organic layer disposed on the pixel electrode, and a counter-electrode disposed on the organic layer.
9 . The organic EL device according to claim 7 , wherein the recess part includes at least one of a first recess portion in which the organic layer and the counter-electrode are missing on the pixel electrode, and a second recess portion in which the counter-electrode is missing on the organic layer.
10 . The organic EL device according to claim 9 , wherein the protection film is in contact with a top surface of the pixel electrode in the first recess portion.
11 . The organic EL device according to claim 9 , wherein the protection film is in contact with a top surface of the organic layer in the second recess portion.
12 . The organic EL device according to claim 7 , wherein the protection film is formed of an inorganic compound.
13 . A manufacturing method of an organic EL device, comprising:
forming a pixel electrode above an insulating substrate;
forming an organic layer on the pixel electrode;
forming a counter-electrode on the organic layer; and
performing dry wash which jets toward a surface of a process substrate, on which the counter-electrode is already formed, particulate matter which is sublimated after colliding with the surface of the process substrate.
14 . The manufacturing method of an organic EL device, according to claim 13 , wherein the dry wash is performed in an inactive atmosphere.
15 . The manufacturing method of an organic EL device, according to claim 13 , wherein the particulate matter is jetted together with an inert gas.
16 . The manufacturing method of an organic EL device, according to claim 13 , wherein the particulate matter is carbon dioxide particles in which carbon dioxide is coagulated.
17 . The manufacturing method of an organic EL device, according to claim 13 , wherein the dry wash is performed while the process substrate is being de-electrified by an ionizer.
18 . The manufacturing method of an organic EL device, according to claim 13 , wherein a direction, in which the particulate matter is jetted toward the process substrate is a direction inclined to a normal line of the process substrate.
19 . The manufacturing method of an organic EL device, according to claim 13 , wherein a protection film covering the surface of the process substrate is formed after the dry wash.
20 . The manufacturing method of an organic EL device, according to claim 19 , wherein the protection film is formed of an inorganic compound.