Semiconductor device for electrostatic discharge protection
View Patent ↗Provided is a semiconductor device for electrostatic discharge protection capable of protecting an inner circuit from both noises of an overcurrent noise of an ESD and an overcurrent noise of a latch-up test while achieving size reduction, by sharing a guard ring formed in a periphery of an ESD protection element with a cathode of a latch-up protection diode for protecting the inner circuit from the overcurrent noise of the latch-up test.
1. A semiconductor device for electrostatic discharge protection, comprising:
a semiconductor substrate;
an electrostatic discharge (ESD) protection element disposed in a surface of the semiconductor substrate and connected between an input/output terminal and a ground terminal;
a first well region having the same conductivity type as the semiconductor substrate, and surrounding the ESD protection element;
a first high concentration substrate region having the same conductivity type as the semiconductor substrate, and surrounding the ESD protection element in the first well region;
a second well region having an opposite conductivity type to the conductivity type of the semiconductor substrate, and surrounding an outer side of the first well region;
a high concentration anode region having the same conductivity type as the semiconductor substrate, disposed in the second well region separately from the first well region; and
a second high concentration diffusion region having the opposite conductivity type to the conductivity type of the semiconductor substrate and disposed in the second well region, the second high concentration diffusion region surrounding the high concentration anode region disposed in the second well region and the first well region as a guard ring of the ESD protection element, the guard ring of the ESD protection element corresponding to a cathode of a latch-up protection diode, wherein:
the high concentration anode region is connected to the input/output terminal;
the first high concentration substrate region is connected to the ground terminal; and
the second high concentration diffusion region is connected to a power supply terminal.
2. A semiconductor device for electrostatic discharge protection according to claim 1 , wherein the ESD protection element comprises a protection diode which has an anode connected to the input/output terminal and a cathode connected to the ground terminal.
3. A semiconductor device for electrostatic discharge protection according to claim 1 , wherein the ESD protection element comprises a metal oxide semiconductor (MOS) transistor which has a drain connected to the input/output terminal and a source, a gate, and a backgate connected to the ground terminal.
4. A semiconductor device for electrostatic discharge protection, comprising:
a semiconductor substrate;
an electrostatic discharge (ESD) protection element disposed in a surface of the semiconductor substrate and connected between an input/output terminal and a ground terminal;
a first well region having the same conductivity type as the semiconductor substrate, and surrounding the ESD protection element;
a first high concentration substrate region having the same conductivity type as the semiconductor substrate, and surrounding the ESD protection element in the first well region;
a second well region having an opposite conductivity type to the conductivity type of the semiconductor substrate, and surrounding an outer side of the first well region;
a high concentration anode region having the same conductivity type as the semiconductor substrate, disposed in the second well region; and
a second high concentration diffusion region having the opposite conductivity type to the conductivity type of the semiconductor substrate, disposed in the second well region to surround each of the high concentration anode region and the first well region and to share a part thereof, wherein:
the high concentration anode region is connected to the input/output terminal;
the first high concentration substrate region is connected to the ground terminal; and
the second high concentration diffusion region is connected to a power supply terminal;
wherein the ESD protection element comprises a thyristor which has an anode connected to the input/output terminal and a cathode connected to the ground terminal.
5. A semiconductor device for electrostatic discharge protection, comprising:
a semiconductor substrate;
an electrostatic discharge (ESD) protection element disposed in a surface of the semiconductor substrate and connected between an input/output terminal and a ground terminal;
a first well region having the same conductivity type as the semiconductor substrate, and surrounding the ESD protection element;
a first high concentration substrate region having the same conductivity type as the semiconductor substrate, and surrounding the ESD protection element in the first well region;
a second well region having an opposite conductivity type to the conductivity type of the semiconductor substrate, and surrounding an outer side of the first well region;
a high concentration anode region having the same conductivity type as the semiconductor substrate, disposed in the second well region; and
a second high concentration diffusion region having the opposite conductivity type to the conductivity type of the semiconductor substrate, disposed in the second well region to surround each of the high concentration anode region and the first well region and to share a part thereof, wherein:
the high concentration anode region is connected to the input/output terminal;
the first high concentration substrate region is connected to the ground terminal;
the second high concentration diffusion region is connected to a power supply terminal; and
an embedded layer having the same conductivity type as the second well region, formed under the second well region so as to increase carrier recombination.