Thin film transistor and method of fabricating the same
Provided are a thin film transistor in which an oxide semiconductor combined with a nitride containing boron or aluminum is applied to a channel layer and a method of fabricating the same. The thin film transistor in which an oxide semiconductor combined with a nitride containing boron or aluminum is applied to a channel layer exhibits significantly improved mobility and increased stability at a high temperature.
1. A method of fabricating a thin film transistor, comprising:
forming source and drain electrodes, a channel layer, a gate insulating layer and a gate electrode on a substrate, wherein the channel layer is formed of a semiconductor thin film formed of an oxide semiconductor combined with a nitride containing boron or aluminum; and
patterning the channel layer,
wherein the nitride containing boron or aluminum is included such that the boron or aluminum exists within a range of 0.01 to 50 at % on the basis of the total atomic weight of metal atoms of an oxide semiconductor constituting the semiconductor thin film.
2. The method of claim 1 , further comprising forming a channel protection layer on the channel layer using an insulating material, wherein the channel protection layer is patterned together with the channel layer.
3. The method of claim 1 , wherein when the channel layer is formed, the oxide semiconductor is formed of at least one material selected from the group consisting of ZnO, In—Zn—O, Zn—Sn—O, In—Ga—ZnO, Zn—In—Sn—O, In—Ga—O and SnO 2 .
4. The method of claim 2 , wherein the channel protection layer is formed to a thickness of 1 nm to 20 nm using at least one insulating material selected from the group consisting of AlOx, SiNx and SiOx by chemical vapor deposition (CVD), atomic layer deposition (ALD) or sputtering.
5. The method of claim 1 , wherein when the channel layer is patterned, the patterning is performed using photoresist, and etching is performed by dry or wet etching or ion milling.
6. The method of claim 2 , wherein when the channel protection layer is patterned, the patterning is performed using photoresist, and etching is performed by dry or wet etching or ion milling.
7. A method of fabricating a thin film transistor, comprising:
forming source and drain electrodes, a channel layer, a gate insulating layer and a gate electrode on a substrate, wherein the channel layer is formed of a semiconductor thin film formed of an oxide semiconductor combined with a nitride containing boron or aluminum; and
patterning the channel layer,
wherein the channel layer is formed by depositing the oxide semiconductor combined with the nitride containing boron or aluminum to a thickness of 5 to 100 nm by sputtering, pulsed laser deposition (PLD) or ion-beam deposition at room temperature to 300° C., and by performing post-annealing at a temperature below 600° C.
8. A method of fabricating a thin film transistor, comprising:
forming source and drain electrodes, a channel layer, a gate insulating layer and a gate electrode on a substrate, wherein the entire channel layer comprises only mixed material formed by mixing an oxide semiconductor and a nitride, and the mixed material comes in direct contact with the gate insulating layer, and the nitride contains boron or aluminum; and
patterning the channel layer.