Semiconductor device
View Patent ↗A semiconductor device includes a base insulating film on which a silicon fuse, silicon wiring patterns, and a silicon guard ring are formed. The silicon guard ring surrounds the silicon fuse and has silicon cutout parts so as not to contact the silicon wiring patterns. A via guard ring, which has via cutout parts located above the silicon cutout parts, is formed in an interlayer insulating film and on the silicon guard ring. A metal wiring guard ring is formed on the via guard ring and the interlayer insulating film. A silicon nitride film is formed on the interlayer insulating film so as to cover the metal wiring guard ring. An interface between the interlayer insulating film and the metal wiring guard ring at the via cutout parts is covered by the silicon nitride film.
1. A semiconductor device comprising:
a base insulating film formed on a semiconductor substrate;
a silicon fuse formed on the base insulating film;
two silicon wiring patterns formed on the base insulating film, each of the two silicon wiring patterns being connected to either end of the silicon fuse;
a silicon guard ring formed on the base insulating film so as to surround the silicon fuse, the silicon guard ring having silicon cutout parts such that the silicon guard ring does not contact the two silicon wiring patterns;
an interlayer insulating film formed on the base insulating film so as to cover the silicon fuse, the two silicon wiring patterns, and the silicon guard ring;
a first via guard ring made of metal that is implanted into a first via hole formed in the interlayer insulating film and on the silicon guard ring so as to surround the silicon fuse as viewed from the top, the first via guard ring having via cutout parts at positions above the silicon cutout parts;
a metal wiring guard ring having a ring shape and made of metal formed on the first via guard ring and the interlayer insulating film so as to surround the silicon fuse as viewed from the top;
a silicon nitride film formed on the interlayer insulating film so as to cover the metal wiring guard ring;
a final protection film made of a final insulating film formed on the silicon nitride film; and
a fuse opening provided by forming a thin part in insulating films of the semiconductor device, the thin part being formed above the silicon fuse and inside guard rings of the semiconductor device, the insulating films including at least one of the interlayer insulating film, the silicon nitride film, and the final protection film, and the guard rings including the silicon guard ring, the first via guard ring, and the metal wiring guard ring.
2. The semiconductor device according to claim 1 , wherein
the interlayer insulating film includes a BPSG film as a lower layer and an SOG film as an upper layer which are laminated to each other, and
the nitride film is also formed on portions of the interlayer insulating film outside the guard rings.
3. The semiconductor device according to claim 1 , wherein
the fuse opening is formed above the silicon nitride film.
4. The semiconductor device according to claim 1 , further comprising:
a second interlayer insulating film interposed between the silicon nitride film and the final protection film, the second interlayer insulating film being an inter-metal-wiring-layer insulating film;
a second via guard ring having a ring shape and made of metal that is implanted into a second via hole having a ring shape and formed in the second interlayer insulating film and above the metal wiring guard ring; and
a second metal wiring guard ring having a ring shape and formed on the second via guard ring, wherein
the second interlayer insulating film, the second via guard ring, and the second metal wiring guard ring form a combination, and
the semiconductor device includes one or more of the combinations.