Method of fabricating polysilicon layer, thin film transistor, organic light emitting diode display device including the same, and method of fabricating the same
View Patent ↗A method of fabricating an organic light emitting diode (OLED) display device having a thin film transistor including a polysilicon layer. The method of fabricating a polysilicon layer includes forming a buffer layer on a substrate, forming a metal catalyst layer on the buffer layer, diffusing a metal catalyst into the metal catalyst layer to the buffer layer, removing the metal catalyst layer, forming an amorphous silicon layer on the buffer layer, and annealing the substrate to crystallize the amorphous silicon layer into a polysilicon layer. The thin film transistor includes a substrate, a buffer layer disposed on the substrate, a semiconductor layer disposed on the buffer layer, a gate insulating layer disposed above the substrate and on the semiconductor layer, a gate electrode disposed on the gate insulating layer, a source electrode and a drain electrode both electrically connected to the semiconductor layer, and a metal silicide disposed between the buffer layer and the semiconductor layer.
1. A thin film transistor comprising:
a substrate;
a buffer layer disposed on the substrate and comprising a metal catalyst therein;
a semiconductor layer disposed on an upper surface of the buffer layer;
a gate insulating layer disposed above both the substrate and the semiconductor layer;
a gate electrode disposed on the gate insulating layer;
a source electrode and a drain electrode both electrically connected to the semiconductor layer; and
a metal silicide disposed between the buffer layer and the semiconductor layer,
wherein the buffer layer is surface treated with ozone, such that the upper surface of the buffer layer is oxidized and thereby configured to control an amount of the metal catalyst that is diffused from the buffer layer and converted into the metal silicide.
2. The thin film transistor according to claim 1 , wherein the metal catalyst includes any one selected from the group consisting of Ni, Pd, Ag, Au, Al, Sn, Sb, Cu, Ti, and Cd.
3. The thin film transistor according to claim 1 , wherein the buffer layer has a thickness of about 10 Å to about 5000 Å.
4. The thin film transistor according to claim 1 , wherein the buffer layer is formed of any one selected from a silicon oxide layer, a silicon nitride layer, and a combination layer thereof.
5. The thin film transistor according to claim 1 , wherein a seed group region, in which the metal silicide is gathered, has a plane shape.
6. The thin film transistor according to claim 5 , wherein the metal silicide is disposed up to 10 nm below an upper side of the buffer layer.
7. A thin film transistor comprising:
a substrate;
a buffer layer disposed on the substrate and comprising a metal catalyst therein;
a semiconductor layer disposed on the buffer layer;
a source electrode and a drain electrode disposed on respective sides of the semiconductor layer so as to expose a portion of the semiconductor layer;
a gate insulating layer disposed on the substrate, the source electrode and the drain electrode;
a gate electrode corresponding to the semiconductor layer and disposed on the gate insulating layer; and
a metal silicide disposed between the buffer layer and the semiconductor layer,
wherein the buffer layer is surface treated with ozone, such that the upper surface of the buffer layer is oxidized and thereby configured to control an amount of the metal catalyst that is diffused from the buffer layer and converted into the metal silicide.
8. The thin film transistor according to claim 7 , wherein the metal catalyst includes any one selected from the group consisting of Ni, Pd, Ag, Au, Al, Sn, Sb, Cu, Ti, and Cd.
9. The thin film transistor according to claim 7 , wherein the buffer layer has a thickness of about 10 Å to about 5000 Å.
10. The thin film transistor according to claim 7 , wherein the buffer layer is any one selected from a silicon oxide layer, a silicon nitride layer, and a combination layer thereof.
11. The thin film transistor according to claim 7 , wherein a seed group region, in which the metal silicide is gathered, has a plane shape.
12. The thin film transistor according to claim 11 , wherein the metal silicide is disposed up to 10 nm below an upper side of the buffer layer.
13. An organic light emitting diode display device comprising:
a substrate;
a buffer layer disposed on the substrate and comprising a metal catalyst therein;
a semiconductor layer disposed on the buffer layer;
a gate insulating layer disposed on the substrate including the semiconductor layer;
a gate electrode disposed on the gate insulating layer;
a source electrode and a drain electrode both electrically connected to the semiconductor layer; and
a metal silicide disposed between the buffer layer and the semiconductor layer,
wherein the buffer layer is surface treated with ozone, such that the upper surface of the buffer layer is oxidized and thereby configured to control an amount of the metal catalyst that is diffused from the buffer layer and converted into the metal silicide.
14. The organic light emitting diode display device according to claim 13 , wherein the metal catalyst includes any one selected from the group consisting of Ni, Pd, Ag, Au, Al, Sn, Sb, Cu, Ti, and Cd.
15. The organic light emitting diode display device according to claim 13 , wherein the buffer layer has a thickness of about 10 Å to about 5000 Å.
16. The organic light emitting diode display device according to claim 13 , wherein the buffer layer is formed of any one selected from a silicon oxide layer, a silicon nitride layer, and a combination layer thereof.
17. The organic light emitting diode display device according to claim 13 , wherein a seed group region, in which the metal silicide is gathered, has a plane shape.
18. The organic light emitting diode display device according to claim 13 , wherein the metal silicide is disposed up to 10 nm below an upper side of the buffer layer.