Magnetic balance type current sensor
View Patent ↗A magnetic balance type current sensor measures a measured current which flows in a feedback coil when electrical conduction is provided by a voltage difference according to an induction magnetic field from the measured current and an equilibrium state is reached in which the induction magnetic field and a cancel magnetic field cancel each other. Sensor elements in a pair are arranged at positions with magnetic field from the measured current. The magnetization direction of the pinned magnetic layer in the magnetoresistive effect element of one sensor element is aligned in a forward direction with respect to the magnetic field formed by the measured current. The magnetization direction of the pinned magnetic layer in the magnetoresistive effect element of the other sensor element is aligned in a reverse direction with respect to the magnetic field formed by the measured current.
1. A magnetic balance type current sensor comprising:
a pair of sensor elements, each sensor element having a magnetoresistive effect element, the resistance value of which changes due to application of an induction magnetic field from a measured current and which has a pinned magnetic layer, a pinned resistive element, and a feedback coil arranged in the vicinity of the magnetoresistive effect element to generate a cancel magnetic field canceling the induction magnetic field, the pair of sensor elements constituting a bridge circuit for magnetic field detection including two outputs, which generate a voltage difference according to the induction magnetic field,
wherein the measured current is measured on the basis of a current which flows in the feedback coil when electrical conduction is provided to the feedback coil by the voltage difference and an equilibrium state is reached in which the induction magnetic field and the cancel magnetic field cancel each other,
the sensor elements are arranged at positions with equal magnetic field from the measured current,
the magnetization direction of the pinned magnetic layer in the magnetoresistive effect element of one sensor element is aligned in a forward direction with respect to the magnetic field formed by the measured current, and
the magnetization direction of the pinned magnetic layer in the magnetoresistive effect element of the other sensor element is aligned in a reverse direction with respect to the magnetic field formed by the measured current.
2. The magnetic balance type current sensor according to claim 1 , further comprising:
arithmetic means for calculating a difference between a current flowing in the feedback coil of the one sensor element and a current flowing in the feedback coil of the other sensor element.
3. The magnetic balance type current sensor according to claim 1 ,
wherein a magnetic shield is provided to attenuate the induction magnetic field and to enhance the cancel magnetic field, and
the feedback coil, the magnetic shield, and the bridge circuit for magnetic field detection are formed on the same substrate.
4. The magnetic balance type current sensor according to claim 3 ,
wherein the feedback coil is arranged between the magnetic shield and the bridge circuit for magnetic field detection.