Formulations for environmentally friendly photoresist film layers
View Patent ↗Environmentally friendly thick film layers for a micro-fluid ejection head and micro-fluid ejection heads are disclosed. The environmentally friendly thick film layer includes a negative photoresist layer derived from a composition comprising a multi-functional epoxy compound, a low molecular weight polymeric difunctional epoxy compound, a monomeric difunctional epoxy compound, a methide-based photoacid generator that does not contain antimony, a chromophore and an aryl ketone solvent. Optionally the photoresist layer contains an adhesion enhancer. The negative photoresist layer is environmentally friendly and provides good resolution, well defined critical dimensions, straight side walls, and a large processing window.
1. An environmentally friendly negative photoresist thick film layer for a micro-fluid ejection head, the photoresist film layer being derived from a composition comprising:
from about 20 to about 30 percent by weight of a low molecular weight polymeric difunctional epoxy component having a weight average molecular weight ranging from about 2500 to about 4000 Daltons,
from about 20 to about 30 percent by weight of a multifunctional epoxy component,
from about 2 to about 3 percent by weight of a monomeric difunctional epoxy component,
from about 0.5 to about 2 percent by weight of a tris-[4-(4-acetyl-phenylsulfanyl) -phenyl]sulfonium-tris(trisfluoromethanesulfonyl)methide photoacid generator,
from about 0.5 to about 1.5 percent by weight of a chromophore, and a balance aryl ketone solvent,
wherein, upon curing, the environmentally friendly photoresist film layer has a thickness ranging from about 5 to about 30 microns.
2. The environmentally friendly thick film layer of claim 1 , wherein the chromophore comprises isopropyl-9-H-thioxanthen-9-one.
3. The environmentally friendly thick film layer of claim 1 , wherein the aryl ketone solvent comprises acetophenone.
4. The environmentally friendly thick film layer of claim 1 further comprising an adhesion enhancer having an alkoxysilane compound.
5. The environmentally friendly thick film layer of claim 4 , wherein the alkoxysilane compound comprises gamma-glycidoxypropyltrimethoxysilane.
6. The environmentally friendly thick film layer of claim 1 , wherein the composition includes substantially equal parts of the multifunctional epoxy compound and the low molecular weight polymeric difunctional epoxy compound.
7. The environmentally friendly thick film layer of claim 1 , wherein the tris-[4-(4-acetyl-phenylsulfanyl)-phenyl]sulfonium-tris(trisfluoromethanesulfonyl)methide photoacid generator is sensitive to i-line radiation at around 365 nm.
8. An environmentally friendly thick film layer for a micro-fluid ejection head, comprising a negative photoresist layer derived from a composition comprising:
from about 20 to about 30 percent by weight of a multi-functional epoxy compound,
from about 20 to about 30 percent by weight of a low molecular weight polymeric difunctional epoxy compound,
from about 6 to about 9 percent by weight of a monomeric difunctional epoxy compound,
from about 1 to about 2 percent by weight of a tris-[4-(4-acetyl-phenylsulfanyl) -phenyl]sulfonium-tris(trisfluoromethanesulfonyl)methide photoacid generator devoid of antimony, and
a balance aryl ketone solvent,
wherein the negative photoresist layer has a thickness ranging from about 5 to about 30 microns.
9. The environmentally friendly thick film layer of claim 8 wherein the aryl ketone solvent comprises acetophenone.
10. The environmentally friendly thick film layer of claim 8 , wherein the methide tris-[4-(4-acetyl-phenylsulfanyl)-phenyl]sulfonium-tris(trisfluoromethanesulfonyl) methide photoacid generator is sensitive to i-line radiation at around 365 nm.
11. The environmentally friendly thick film layer of claim 8 , wherein the composition includes substantially equal parts of the multifunctional epoxy compound and the low molecular weight polymeric difunctional epoxy compound.