Device and method for fabricating display device
View Patent ↗A device for manufacturing a display device includes a deposition source; a deposition thickness calculator for calculating a deposition thickness of a deposition material deposited on a substrate; and a controller for controlling a power of a heater which heats the deposition source by comparing the deposition thickness calculated with a reference thickness. The controller controls the power of the heater either at least one time for each substrate on which the thin film is to be deposited or at regular intervals while the deposition material is deposited. Influence of measurement noise that is included in a quartz crystal sensor for measuring a deposition speed may be minimized, and distribution of deposition thickness of an organic light emitting material may be reduced, thereby increasing the yield of the deposition process and producing quality display devices.
1. A device for manufacturing a display device, comprising:
a deposition source;
a deposition thickness calculator making determination of a deposition thickness of a deposition material deposited on a substrate, and the deposition material being provided by the deposition source;
a controller controlling application of power to a heater disposed to heat the deposition source by comparing the deposition thickness determined with a reference thickness, and the controller controlling the power of the heater either once when each substrate is loaded into a deposition chamber or at regular intervals during each period while the deposition material is deposited on the substrate; and
a deposition speed measuring sensor measuring a vapor volume of the deposition material that is sublimated from the deposition source with the deposition material filling the deposition chamber, the deposition speed measuring sensor not coexisting in the device for manufacturing the display device with a deposition thickness measurer which irradiates light to a pattern of a thin film that is deposited onto the substrate, receives the light reflected by the pattern of the thin film, and measures a polarization state of the light reflected,
wherein the deposition speed measuring sensor comprises a quartz crystal sensor and the deposition speed measuring sensor measures the vapor volume emitted from the deposition source before contacting the substrate.
2. The device of claim 1 , further including a deposition rate calculator providing a representation of a deposition speed of the deposition material by using the measured vapor volume of the deposition material.
3. The device of claim 2 , wherein the deposition thickness calculator calculates the deposition thickness of the deposition material by integrating the deposition speed of the deposition material with respect to time.