Semiconductor device and method of manufacturing the same
View Patent ↗Provided is a semiconductor device formed to an SOI substrate including a MOS transistor in which a parasitic MOS transistor is suppressed. The semiconductor device formed on the SOI substrate by employing a LOCOS process is structured such that a part of a polysilicon layer to becomes a gate electrode includes: a first conductivity type polysilicon region corresponding to a region of the silicon active layer which has a constant thickness and is to become a channel; and second conductivity type polysilicon regions corresponding to LOCOS isolation edges in each of which a thickness of the silicon active layer decreases.
1. A method of manufacturing a semiconductor device comprising a first conductivity type MOS transistor formed on a silicon active layer of an SOI substrate, the method comprising:
forming a LOCOS isolation region having a thickness sufficient to contact a buried insulating film and define a MOS transistor region in the silicon active layer;
forming a gate insulating film having a thickness of about 5 to 30 nm in the MOS transistor region by thermal oxidation;
forming a polysilicon layer having a thickness of 200 to 400 nm on the gate insulating film;
a first impurity doping step comprising doping an impurity in a portion of the polysilicon layer above a channel region of the silicon active layer to form:
a first conductivity-type polysilicon region above the channel region of the silicon active layer, where the silicon active layer has a constant thickness; and
second conductivity-type polysilicon regions above edges of the LOCOS isolation region, where the second conductivity-type is opposite to the first conductivity-type, and where a thickness of the silicon active layer decreases compared to the constant thickness;
etching the polysilicon layer to form a gate electrode;
a second impurity doping step comprising partially and selectively doping a first conductivity-type impurity in the silicon active layer in the MOS transistor region to define a source region and a drain region;
forming an intermediate insulating layer on the SOI substrate;
forming a contact hole in the intermediate insulating layer;
forming a metal wiring in the contact hole; and
forming a protective film.
2. A method of manufacturing a semiconductor device according to claim 1 , wherein the first impurity doping step comprises:
turning a conductivity of a first part of the polysilicon layer into a first conductivity-type selectively by doping a first conductive impurity by ion implantation with an impurity concentration of 1×10 18 atoms/cm 3 or more after application of a photoresist onto the polysilicon layer and patterning;
turning conductivity of a second part of the polysilicon layer into a second conductivity-type selectively by doping a second conductive impurity by ion implantation with an impurity concentration of 1×10 18 atoms/cm 3 or more after application of a photoresist onto the polysilicon layer and patterning.
3. A method of manufacturing a semiconductor device according to claim 1 , wherein the first impurity doping step comprises:
forming an oxide film with a thickness of about 300 to 400 nm to form a hard mask by heat treatment;
forming a photoresist pattern and etching the oxide film;
turning a conductivity of a first part of the polysilicon layer into one of a first conductivity-type and a second conductivity-type selectively by performing pre-deposition of corresponding one of a first conductivity-type impurity and a second conductivity-type impurity with an impurity concentration of 1×10 18 atoms/cm 3 or more; and
selectively turning a conductivity of a second part of the polysilicon layer into a reverse conductivity-type to the first part of the polysilicon layer by removing the oxide film and doping a reverse conductive impurity by ion implantation on an entire region with an impurity concentration of 1×10 18 atoms/cm 3 or more.
4. A method of manufacturing a semiconductor device according to claim 1 , wherein the first impurity doping step comprises:
forming an oxide film with a film thickness of about 300 to 400 nm to form a hard mask by heat treatment;
forming a photoresist pattern and etching the oxide film;
turning a conductivity of a first part of the polysilicon layer into one of a first conductivity-type and a second conductivity-type selectively by performing pre-deposition of corresponding one of a first conductivity-type impurity and a second conductivity-type impurity with an impurity concentration of 1×10 18 atoms/cm 3 or more;
forming an oxide film with a film thickness of about 300 to 400 nm to form a hard mask by heat treatment;
forming a photoresist pattern and etching the oxide film; and
selectively turning a conductivity of a second part of the polysilicon layer into a reverse conductivity-type to the first part of the polysilicon layer by performing pre-deposition of a reverse conductive impurity.
5. A method of manufacturing a semiconductor device comprising a first conductivity-type MOS transistor formed on a silicon active layer of an SOI substrate, the method comprising:
forming a LOCOS isolation region having a thickness sufficient to contact a buried insulating film and define a MOS transistor region in the silicon active layer;
forming a gate insulating film having a thickness of about 5 to 30 nm in the MOS transistor region by thermal oxidation;
forming a polysilicon layer having a thickness of 200 to 400 nm on the gate insulating film;
a first impurity doping step comprising doping an impurity in a portion of the polysilicon layer above a channel region of the silicon active layer to form: a first conductivity-type polysilicon region above the channel region of the silicon active layer, where the silicon active layer has a constant thickness; and second conductivity-type polysilicon regions above edges of the LOCOS isolation region, where the second conductivity-type is opposite to the first conductivity-type, and where a thickness of the silicon active layer decreases compared to the constant thickness;
etching the polysilicon layer to form a gate electrode;
a second impurity doping step comprising partially and selectively doping a first conductivity-type impurity in the silicon active layer in the MOS transistor region to define a source region and a drain region;
forming an intermediate insulating layer on the SOI substrate;
forming a contact hole in the intermediate insulating layer;
partially and selectively doping a second conductivity-type impurity in the source region through patterning with a photoresist after the second impurity doping step of doping a first conductivity type impurity;
forming a metal wiring in the contact hole; and
forming a protective film.
6. A method of manufacturing a semiconductor device comprising a first conductivity-type MOS transistor formed on a silicon active layer of an SOI substrate, the method comprising:
forming a LOCOS isolation region having a thickness sufficient to contact a buried insulating film by thermal oxidation to define a MOS transistor region in the silicon active layer;
forming a gate insulating film having a thickness of about 5 to 30 nm in the MOS transistor region by thermal oxidation;
forming a polysilicon layer having a thickness of 200 to 400 nm on the gate insulating film;
a first impurity doping step comprising doping an impurity in a portion of the polysilicon layer above a channel region of the silicon active layer to form:
a first conductivity-type polysilicon region above the channel region of the silicon active layer, where the silicon active layer has a constant thickness; and
second conductivity-type polysilicon regions above edges of the LOCOS isolation region, where the second conductivity-type is opposite to the first conductivity-type, and where a thickness of the silicon active layer decreases compared to the constant thickness;
forming a refractory metal silicide having a thickness of 500 Å to 2500 Å on the polysilicon layer;
etching the polysilicon layer and the refractory silicide to form a gate electrode;
a second impurity doping step comprising partially and selectively doping a first conductivity-type impurity in the silicon active layer in the MOS transistor region to form a source and a drain;
forming an intermediate insulating layer on the SOI substrate;
forming a contact hole in the intermediate insulating layer;
forming a metal wiring in the contact hole; and
forming a protective film.
7. A method of manufacturing a semiconductor device according to claim 6 , further comprising:
partially and selectively doping a second conductivity-type impurity in the source region through patterning with a photoresist after the second impurity doping step of doping a first conductivity-type impurity.